SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

Base Mounted Metal Seal/Rubber Seal Series VQ

starting from station one on the D side.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Rotary Actuator/Vane Type

Round shaft Round shaft Round shaft Single flat CRB1 C D D D D D D MSU CRJ CRA1 Round shaft Single flat Single flat CRQ2 MSQ Double shaft/CDRB2mJ Double shaft/CRB2mJU Double shaft/CDRB2mJU MSZ With auto switch and angle adjuster unit With angle adjuster unit With auto switch CRQ2X MSQX Round shaft Round shaft Round shaft D D D MRQ [mm] Size 10 15 20 30 40 C 8 9 10 13 15 D 14 18 20 22 30 Note

Rotary Actuator/Vane Style Series CRB2

Single flat D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

Rotary Actuator

Round shaft Round shaft Round shaft Single flat D D D C D D D Round shaft Single flat Single flat (mm) Size 10 15 20 30 40 C D 8 14 9 18 10 20 13 22 15 30 Note) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Digital Flow Monitor

In conditions other than horizontal installation and 0.35 MPa supply pressure, the output may not be 0 L/min. -79No.PF-OMU0007-D Dimensions -80No.PF-OMU0007-D Bracket A (Part No: ZS-46-A1) Bracket B (Part No: ZS-46-A2) -81No.PF-OMU0007-D Panel mount adapter (Part No: ZS-46-B) Panel mount adapter + Front protective cover (Part No: ZS-46-D) -82No.PF-OMU0007-D Lead wire with connector (Part

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

U D B M CE-compliant SI unit part no.

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N11 (3/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type