Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm ) Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

OMR0032

Controller Set Up . 42 9.1 Communication Speed and Controller IDs . 42 9.2 Selection of the input type . 42 9.3 Basic parameter setup . 43 9.4 Movement Profile Recommended for Pulse Input Type . 48 (1) Positioning time . 48 (2) Recommended movement profile . 48 9.5 I/O setup . 49 9.6 Step Data setup . 50 10. Monitor and Test Mode of the Controller . 51 11.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

HRS100/150

L/min 42/56 Pump capacity Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Pump drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) HEA IDH Supply side pressure range

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 1427 VK3000 Series Type 42 Manifold/Base mounted (Side ported) VV5K3-42Station -01 Grommet: G DIN terminal: D Applicable

Electric Actuator with Integrated Guide

BIT 2 5 Program designation BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

thread depth 10 160 20 80 Rc 1/4 Vacuum suction port 100 217 (252) Work piece mounting reference plane Rc 1/4 Vacuum suction port 110 126 Cable entry 199.5 (234.5) 49.5 Stroke + 144 (table movement range) 68 105 120 68 44 Stroke + 393 (428) 2-T-slot 1 170 110 76 2-T-slot 2 8-M10 x 1.5 thread depth 20 Body mounting reference plane 110 (T-slot pitch) 20 3.3 80 5.8 1.7 5.3 76 4-8H10 depth 19

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

CXS

CXSJ6P-: 0.009 kg, CXSJ10P-: 0.014 kg 8-28-19 19 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !

CXS

Refer to Theoretical Output on page 8-28-19.

RLQ

A A1 E1 L1 MM RR1 U1 NZ L CNS 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 +0.5 +0.3 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 36 41.6 +0.058 0 -0.3 -0.5 +0.058 0 +0.5 +0.3 44 50.6 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 CLS CLQ MLGP Knuckle Pin (Common with double clevis pin) Rod End Nut RLQ MLU d d Dd9 ML1C C m

Compact Type

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

Compact Type Dual-Rod Cylinder Series CXSJ

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

5 Port Solenoid Valve SY Series

EA P EB In common Type 42 Bar stock type/Common External EXH Individual wiring SY3 40 SY5 40 P. 79 The base mounting facilitates maintenance after valves are changed.

VK300

-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 10 12 13 17 50.9 15.5 15.2 1.5 3 1.6 9 37.6 23 34 47 46 67 66 87 85 6 11 17 21 30 35 45 51.3 38 11 4 5 5.5 6.5 7 8 8 17 14 19 52.3 39 13 16.2 10 19 17 22 56.6 42 16 18.8 12 22 19 24 59.5 46 18 19.3 Male run tee: KFY Applicable tube (mm) A Effective orifice (mm 2) Weight (g) H1

Plug-in Unit

A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec. COM.

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.