ARM10/11

Handle position VY1 56 Handle position Top Handle position Front Handle position Bottom A B C Top Front Bottom 84 42 G 84 70 70 P 26(Max.28) U 12 S SMC SMC H L 12 SMC O C K PPA SMC 28.5 AL 6 51.5 80 51.5 15 13 OUT IN 3 28 13 15 13 OUT IN OUT IN 3 3 2. IN/OUT piping position 3. IN/OUT fitting type 5.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

J 5 12 9.5 Mounting reference planes B D Section AA MXP12-25 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 2-M2 x 0.4 depth 3 For magnet mounting 8 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) Z MXP12-15 MXP12-25 SMXP12, #1 (#1 + #3) SMXP12, #2 (#2 + #4) L K J V H S G M W Model 24 22 68 59 40 15 76 10 29 55 MXP12-15 42 40 98 89 60 25 106 30 49 75 MXP12-25 11 Precision

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

Brake mechanism added

100 9 71 77 30 10 16 16 299.5 29.5 85 117 227.5 15 15 15 0.1 0.3 +0.3 +0.1 0.032 0.059 12 +0.070 0 12 70 90 50 110 9 81 86 35 12 19 19 328.5 38 95 127 248.5 18 18 15 0.1 0.3 +0.3 +0.1 0.032 0.059 16 +0.070 0 15 86 105 59 130 11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Stroke Reading Cylinder and Counter

Minimum Auto Switch Mounting Stroke (mm) D-A9V D-A7 D-A80 D-A73C D-A80C D-F7W D-J79W D-F7BA D-F79F D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAVL D-M9V D-F7V D-J79C D-M9 D-F7 D-J79 No. of auto switches mounted D-M9W D-M9A D-A7H D-A80H D-A79W D-A9 10 (5) 15 (10) 15 (5) 1 pc. 5 5 10 15 (5) 15 20 (10) 10 15 15 (10) 2 pcs. 5 10 15 15 (5) 20 20 (15) Note) The dimensions stated in ( ) shows the minimum stroke

RSQ

7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series RSQ Operating Range Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12 D-A7H

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Vibration resistance VQ Model VQ4 (1) (2) (3) Weight (g) Response time (ms) Effective area (mm2)(Cv) Standard: 1W High pressure: 1.5W High pressure: 1W Low wattage and AC 2.7 (0.15) Series Configuration Model VQZ Metal seal VQZ1120 12 or less 15 or less 42 Single Rubber seal 5.4 (0.3) VQZ1121 12 or less 15 or less VQD 2 position Metal seal 2.7 (0.15) VQZ1220 10 or less 13 or less Double Rubber

PA300/500/700

/15 3.4 3.7 0.34 0.27 0.86 0.88 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.12 Series VPA300 2.9/2.9 0.27/0.33 0.29/0.41 0.31/0.30 0.31/0.25

CG5-S

30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80

44

10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/8" (9.53) KG 17 19 23.3 8.5 8.5 40

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

AC Servo Motor Driver (SSCNET /H Type)

Parameter list (Driver side) 15 6.

REA/REB

(cm) 25 Bore size (mm) 20 80.7 8 + Lo 10 15 5 + Lo 15 45.5 6.5 + Lo 32 Allowable load weight (WA)(kg) 40 6.

SQ1000/2000

42 P. 49 C6 L6 Terminal number D-sub connector SOL.

Series SV

Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Terminal plug EX500-AC000-S Attach a terminal plug when an input unit is not connected. 6 6 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications Manifold Specification Sheets Valve Manifold Specifications

Vacuum Pad

10 10 1.5, 2, 3.5 # # # 114.5 59 15 15 4, 6, 8 10, 13, 16 # # 66.5 20 20 # # # # # 124.5 25 25 Wide selection of piping For 2 piping!

C95

15 Z7 15 + 40 (n 2)/2 15 + 40 (n 2)/2 n Z80 n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 Y59 15 15 Y7P 15 + 40 (n 2)/2 15 + 40 (n 2)/2 n Y7W Y69 n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 10 10 Y7PV 10 + 30 (n 2)/2 10 + 30 (n 2)/2 n Y7WV n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 20 20 Y7BAL 20 + 45 (n 2)/2 20 + 45 (n 2)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 15 20 P5DWL 15 + 65 (n 2)/2 20 + 65 (n 2)/2

CHKD/CHKG

1.5 7 19 53 128 83.5 81 1/4 22 10 15 24 12 84 108 32 35 M24 x 1.5 8 24 62 146 100.5 97 1/4 25.5 10 18 30 15 97 127 42 45 M30 x 1.5 9 30 78 175 121.5 117 3/8 30 15 20.5 35 17.5 113 148 57 60 M39 x 1.5 14 41 98 221 147 142 3/8 36 15 23 40 20 136 176 72 75 M48 x 1.5 21 50 118 254 271 Auto Switch Mounting CHKD Series Refer to pages 431 to 490 for detailed specifications.