Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Operating Range (mm) Auto switch model Bore size 32 40 50 63 80 100 125 D-A9/A9V 7 7.5 8.5 9.5 9.5 10.5 12 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4 4.5 5 6 6 6 7 D-Z7/Z80 D-A5/A6 D-A59W D-A3/A44 7.5 8.5 7.5 9.5 9.5 10.5 13 9 9 10 11 11 11 10 13 13 13 14 14 15 17 9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 7 D-F5/J5 D-F5W/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Tightening torque: 0.18 to 0.25Nm 1.13-5 Series VQD1000 Dimensions L plug connector: VQD1121l-lL-M5 M plug connector: VQD1121l-lM-M5 Lead wire length: 300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons

VS 8-2/VS 8-4

17 M4 x 7 earth thread 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port 64.5 27 (n-1) x 27 33.5 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port U side D side n Station number 4 2 1 3 L2 97 7 L1 98 56 56 2 (n-1) x 27 27 Indicator light 13 Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 131 8 115 26.5 80 12 12 12 12 4 x M5

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Example: M5 x 50l 4pcs.

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection

MB

42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 Data U CX to 1000 L CZ Z + Stroke RR Without Air Cushion Center trunnion Model without air cushion is designed to include rubber bumpers.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

42

Nil Side ported B Bottom ported 493 VQ5000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ510 0 1 194.8 2 2 195 105.8 59.5 73 121.8 73 59.5 27.5 27.5 4(A) port 17.5 13.5 2(B) port 10.0 M5 x 0.8 Ground screw 3/8" 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 35 53 2 x 6.5 Mounting hole Manual override 35

MXH Series Compact Slide

4 30 40 45 72 6 20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

LEF-OM002xx

Electric actuators / Slider type Common precautions . 39 6.1 Design and selection . 39 6.2 Handling . 39 6.3 Mounting . 40 6.4 Precaution on maintenance . 40 6.5 How to detach and attach the dust seal band . 42 6.6 Replacement of belt . 43 7.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(20P) (Conforming to MIL-C-83503) Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1

HRX-OM-S004

Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No. Fig. 3-13 Wiring of the external switch (PNP open collector output) (example) HRS Series 3.3Installation 3-23 HRX-OM-S004 Chapter 3 Transport and Setting Up Setting items Table 3-10 shows the setting items of the external switch. For details, refer to 5.21 Communication function.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

10

10 14 162 172.5 40 23 11 13 10 14 171 182 50 30 15 17 14 20 194 209 63 30 15 17 14 20 194 209 80 42 23 26 22 30 246 269 100 42 23 26 22 30 246 269 170 180.5 184 195 206 221 206 221 264 287 264 287 Double clevis: (D) / Locking at head end: (-Hl) Cushion valve Port CDH10 ZZ + Stroke Z + Stroke RR U L CX CZ -Wl -Hl/-Rl [mm] Bore size [mm] L RR U CDH10 CX +0.3 +0.1 CZ Z ZZ Z ZZ 32 23 10.5 13

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

MXH

20 50 55 25 25 82 6 60 30 92 60 30 6 8-2-15 14 Series MXH Dimensions: MXH10 LT 11 19 11 LA LB J-M4 X 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia 4.3 6-7.5 counterbore depth 4.4 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Sine Cylinder Series REC

13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.