DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

VCA

For air VV2CA3-05 VCA35-5G-4-03 1 set Manifold part no. 5 sets Valve part no. (Stations 1 to 5) IN port direction Side Front Nil A Series is the symbol for assembly. Add an in front of the part numbers for solenoid valves, etc., to be mounted. 3 4 Class 3 Class 4 Enter together in order, countingfrom station 1 on the D side.

VCA

VV2CA3-05 . For air 1 set Manifold part no. IN port direction 5 sets Valve part no. (Stations 1 to 5) VCA35-5G-4-03 . Side Front Nil A Series 3 4 Class 3 Class 4 "" is the symbol for mounting. Add a "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

%silltr

05 0.o3s27 0.4535 ?,8.3527 L:ngth m m mm 3.281 l.094 0.03937 0.3048 0.914 25.4 TemDeraturc l.8oC+32 ('F-32)/1.8 Area. Section n' cm2 sq. ft. so.inch 10.76 0.155 0.0929 6.45t6 Volume n' m' dm3 foot yard inch 0.76/.5 16.388 2832 Volume Flow n'/min dm3Jmin ffmin) scfm scfm 35.31 0.0353r 0.02832 28.32 Force N oound force (lbf,) 0.2u8 4.448/. Pressure bar lbf.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side/Base (Same side of solenoid) Piping direction/ Location Port size P, E port VT Top/Valve Side/Base (Opposite side of solenoid) VV3Z2-50-0612(A) port M5 x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

Manifold Type: Base Mounted, Valve Stations: 5 Stations, A, B Port: ø4 One-touch Fitting, CE Marked: -

Manifold Type: 42 (Base Mounted), Valve Stations: 5 Stations, A, B Port: C4 (ø4 One-touch Fitting)

Cart SMC SY100-82-2-04 y conncector, SY3000 SOL/VALVE, RUBBER SEAL*** $8.84 + Add to Quote Add To Cart Add to Cart SMC SY100-82-3-05

Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

High Precision Digital Pressure Switch, Series ZSE40/ISE40

: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5 wire oil resistant heavy duty cord (0.15mm) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead wires) Port size Lead wires Weight Note: When equipped with auto shift function, the following ranges can be set.

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: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads Lead wires Weight 5 wire oil resistant heavy duty cord (0.15mmX) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead wires) Note: When equipped with auto shift function, the following ranges can be set.

ZSE40/ISE40

: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 06, A Port Size: One-touch Fitting for ø4, P, R Port Thread: -

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 06, A Port Size: C4 (One-touch Fitting for ø4)

NCA1

No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05