7.4

An M3 port will be installed on the top side of the manifolds SUP/EXH block. How to Order Valves (Example) S0712 R -5G-C4 External pilot port (M3 x 0.5) External pilot Note 1) The dual 3-port valve is not available.

15

(A) (z) Z m x g Examine M3. M3 = m x g x Y = 5.5 x 9.8 x 30/1000 = 1.6 [Nm] 2B = M3/M3max = 1.6/17.0 = 0.10 Refer to [3] Calculation for Overall Center of Gravity in the Y-axis on front matter 7. M3 Find the value of M3max when Va = 200 mm/s from Graph (11) x.

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

CJ2

Bore 6 10 16 6.4 8.1 9.2 5.5 7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A M4 X 0.7 NTJ-010A Clevis pins and set rings are attached.

Slide Tables MX Series

Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Model Model Bolt used Bolt used 6 6.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF8 MXF8 6 5.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF12 MXF12 10 6.5 1.5 {2.1} 1.5 {2.1} M4 x 0.7 M4 x 0.7 MXF16 MXF16 12 9.5 3.2 {4.4} 1.5 {4.4} M5 x 0.8 M5 x 0.8 MXF20 MXF20 18 Long

Series SV

(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.

Pin Clamp Cylinders

x 4 L) and spring washer (M3).

MXS Series Air Slide Table

Axial piping (6) MXS6P 32 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Dimensions not indicated are the same as basic type. 55 MXS Series Air Slide Table Dimensions MXS 8 2-M3 X 0.5 thread 4 deep Operating port 2-M5 X 0.8 7 2 3.5 J 6 Max.9.5 (With stroke adjuster at retraction end) I Basic type 6.5 4 6.5 7 7 3.8 NA-M3 X 0.5 thread 4 deep 14.6 K 7 3.8 14.6 KA 2 (With stroke adjuster at

Table of Contents

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).

SYJA3000

4/5 Port Air Operated Valve Series SYJA3000 Model Pilot port size Valve model Configuration Port size Effective area (mm2 ) (Cv) Weight (2) (g) 22 2 position single SYJA3120-M3 Body ported 5 port base mounted (With sub-plate) 25 2 position double SYJA3220-M3 0.9 (0.05) 3 position closed center SYJA3320-M3 M3 X 0.5 M3 X 0.5 3 position exhaust center SYJA3420-M3 28 3 position pressure center

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

SMC

0.5 3 5.5 (With stroke adjuster at extension end) 18 Stroke adjuster at retraction end Stroke adjuster at extension end N-M3 x 0.5 thread depth 4 (Insert) K 12.5 2-M2.5 x 0.45 thread depth 3 Vacuum suction port M5 x 0.8 6.5 3 3 5.5 3 5.5 5.5 7 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 2 2-M2.5 x 0.45 thread depth 3 Operating port 2-M3 x 0.5 6 3H9 depth 2.5 +0.025 0 HA GA

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

The intersection H is the amount of water included in the compressed air 1 m3 at 0.7 MPa, pressure dew point of 25C. The amount of water is 3.0 g/m3. 10. Therefore, the amount of condensed water is as following.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Max. 5.75 2-M3 x 0.5 2-M4 x 0.7 depth 8 6-M3 x 0.5 depth 4 Top ported: MSUB1-DE B port A port 2-M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Compact 5-Port Solenoid Valve

Loosen the 4 mounting screws (M3) to remove the terminal block cover. Terminal block cover Mounting screw (M3) Gasket 1A 2A 3A 4A 5A 6 Drip proof plug (SY30M-133-1) is mounted Push button Pitch 3.5 mm Tightening torque: 0.8 Nm 1B 2B 3 Spring type terminal block Conduit port 2 x M20 x 1.5 Step 3. Mount the terminal block cover.