0.55 ) 31.5 45 45 (22.5) 40 22 16.3 (50) 4 23.5 39.6 (60) (31.5) (Distance between ports) 1/4, 3/8 1(P), 3(R) port 1P 3R 32 NO 7 2.5 3.8 PE port 30.7 25.6 83.6 Refer to page 24 separately when piping to PE port is required.
Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48
(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.
110 45 70 66 35 11 13 90 3.2 47 220.1 228.6 209.1 222.6 229.1 246.2 AL60-A 1 95 223.1 44.7 47.5 110 47.5 70 66 35 11 13 90 3.2 47 234.1 242.6 223.1 236.6 243.1 256.6 88 Semi-standard Specifications: 1000 cm3 Tank Lubricator AL30 to AL60 Symbol Available for previous models (AL30 to 60).
Specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Valve type Inert gas under vacuum Fluid (C) 5 to 150 Operating pressure (Pa) (abs) 10-6 to atmospheric pressure Conductance (L/s) Note 1) 80 45 14 5 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature, excluding
Keep the ambient temperature of the product between 2 to 45 oC. Operation outside of this ambient temperature range may cause a malfunction of the product. Operating the product in an ambient temperature of 45 oC or higher may reduce the heat discharging efficiency of the heat exchanger and the safety device may trigger, resulting in the product stopping.
(M): SYJ5140-lMll-01 VFS 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) (Mounting holes pitch) VS A B (Mounting holes pitch) 24 B A VS7 A B R P 24 B A 37.5 (Mounting holes pitch) 42.7 4 R P 37.5 4 (Lead wire length) (Mounting holes pitch) 59.9 42.7 300 63.9 [65.2] 73.5 300 (Lead wire length) 62.6 [69.1] 45 51.5 [58] 45 48.6 8.5 48.6 8.5 32.5 39.1 32.5 21.5 21.5 6 6 6 6 10 10 4-Rc(PT)1/8
200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250
HRS HRS 090 HRS 100/150 HRS 100/150 Part no.
, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50
45 50 60 Effective cushioning stroke (mm) Not required (Non-lube) Lubrication +1.4 0 +1.8 0 Stroke length tolerance Up to 1000 st: , 1001 to 1500 st: JIS Symbol Standard Stroke Maximum manufacturable stroke (mm) Minimum stroke (1) Bore size (mm) Standard stroke (2) (Recommended) (mm) 20 150 Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance
45 50 60 Effective cushioning stroke (mm) Not required (Non-lube) Lubrication +1.4 0 +1.8 0 Stroke length tolerance Up to 1000 st: , 1001 to 1500 st: JIS Symbol Standard Stroke Maximum manufacturable stroke (mm) Minimum stroke (1) Bore size (mm) Standard stroke (2) (Recommended) (mm) 20 150 Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance
45 50 60 Effective cushioning stroke (mm) Not required (Non-lube) Lubrication +1.4 0 +1.8 0 Stroke length tolerance Up to 1000 st: , 1001 to 1500 st: JIS Symbol Standard Stroke Maximum manufacturable stroke (mm) Minimum stroke (1) Bore size (mm) Standard stroke (2) (Recommended) (mm) 20 150 Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance
Wn Mass mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3 Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525 kg m3 1 X = x (mn x xn) 7.525 1 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1 mm m3 1 Y = x
Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,
View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8
(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134
(Default settings) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed in both energized and de-energized states in the axial direction and at right angles to the main valve and armature.
80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28
." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .