Multistage Ejector Series ZL112.212

20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140

Multistage Ejector (N)ZL Series

40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140

Process Pump Series PA3000/5000/PAX1000 Series PB1000

.> 140 Air consumption l/min (ANR) 120 SUP=0.5MPa 100 Note 1) If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to a discharge pressure of 0.1MPa. SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

.> 140 Air consumption l/min (ANR) 120 SUP=0.5MPa 100 Note 1) If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to a discharge pressure of 0.1MPa. SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Rotary Cylinder Series MRQ

F(N) F(N) Stroke 15 105 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Number of Auto Switches Mounted Rotation angle Linear motion 0 02 0S 1 S2 SS S0 D2 Nil 2S 20 n n2 nS n0 Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 353 Rotary Actuators Precautions 1 Be sure to read this before handling.

Vacuum Pad with Ejector

Response Time *2) [ms] ZHP[]BM[]-07[] ZHP[]BM[]-10[] ZHP[]BM[]-12[] ZHP[]BM[]-15[] 63 295 143 120 86 80 455 221 190 140 2) Response time means a period of time that the vacuum pressure reaches 57 kPa after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is 0.35 MPa.

Compact Cylinder

size [mm] Cylinder stroke [mm] 5 10 15 20 25 30 35 40 45 50 5 10 15 20 25 30 35 40 45 50 12 25 29 34 38 43 48 12 21 25 30 35 39 44 16 32 37 43 48 53 58 16 28 33 38 43 49 54 20 53 61 68 75 83 90 98 105 112 120 20 40 47 55 62 69 77 84 91 99 106 25 73 82 91 100 109 119 128 137 146 155 25 55 64 73 83 92 101 110 119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175

Intrinsically Safe Valve

type (TT) 53-SS5Y5-20Stations Stations 189.6 156 143.4 177 71.7 88.5 Max. 10 L (Lead wire length) L (Lead wire length) 41.7 39 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 328 L1 L2 60 76 92 108 124 140

Exhaust Cleaner for Vacuum Pump AMV Series

When gaskets are required, order 4 pcs. of the AMV-SA003. 788 Exhaust Cleaner for Vacuum Pump AMV Series Flow Rate Characteristics Oil: turbine oil #140 Element initial state Element oil saturated state Caution on Handling Caution AMV37 AMV160 AMV3 AMV75 AMV6 0.02 1. Install with the port down in a vertical position. 2. Tighten the product at the hexagonal part of the port. 3.

Series AP500

40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Symbol Indication symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 4, 6 6, 8 6 8, 10 6 8 10, 12 10 12 Metric size 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size 350 500 600 700 1200 1300 295 75 175 Flow rate (L/min (ANR)) Controlled flow Free flow

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

ZP

8.5 Dimensions by Stroke Dimensions by Stroke 4 tube 6 tube D C E Model F G H F G H 10 13 16 H 4 tube 6 tube Model ZPYB16--A8 64 38 15 F G F G F G J K L J K L ZPYB10--A8 ZPYB10--A10 95 41 53 55.5 89.5 57 91 23 87 15.5 2.5 7 13.5 1.8 5 ZPYB15--A8 ZPYB20--A10 46 100 43 127.5 129 63 65.5 67 125 51 ZPYB25--A8 ZPYB30--A10 56 110 5 1.8 14.5 7 2.5 16.5 137.5 139 73 75.5 77 135 ZPYB40--A10 173.5 175

ZP

18 12.5 21.5 1.2 3.5 30.4 46.5 10 16 J Model Dimensions by Stroke G H G H 10, 13 16 ZPRD10-0-A10 60 23 83 61 84 J Model G H G H ZPRD20-0-A10 70 132 71 133 51 U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 91 57 57.5 23 91.5 ZPRD40-0-A10 90 178 91 179 129 67 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101 189 139 77 77.5 139.5 87 175

S Couplers Series KK/KKH/KK13

K M H KK D Straight section MS Mounting pitch A Proper tightening torque Nm Connection thread size LQ Fig. 1 Recommended piping 7 to 9 NPT, R 1/8 Unit: mm MQR Tubing size Mounting pitch A 12 to 14 NPT, R 1/4 Straight section Nylon tube Soft nylon tube Polyurethane tube 44 or more 56 or more 67 or more 84 or more 89 or more 112 or more 140 or more 134 or more 168 or more 178 or more 224 or

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Specification: Built-in magnet, Support bracket: Through-hole

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Specification: Built-in magnet, Support bracket: Through-hole

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Specification: Built-in magnet, Support bracket: Through-hole