MY1

(Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8

Cylinder with Lock

5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

MNB

20 111.2 22.4 M8 x 1.25 5 183 47 1/4 58 63 31.5 8.5 7 9 259 M18 x 1.5 12 23 55 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 38 10.5 10 11.5 321 M22 x 1.5 14 33 61 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10.5 38 10 17 341 M26 x 1.5 15 68 37.5 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5

MNB

22.4 47.5 M8 x 1.25 5 183 47 1/4 58 63 8.5 31.5 7 9 259 M18 x 1.5 12 55 23 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 10.5 10 38 11.5 321 M22 x 1.5 61 33 14 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10 38 10.5 17 341 M26 x 1.5 37.5 15 68 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5

Slider Type/Ball Bushing Bearing

(mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 Moment (Nm) 25 25 25 5 10 15 20 0 5 10 15 20 0 Moment (Nm) Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 CY1HT25 CY1HT32 CY1HT25 CY1HT25 CY1HT32 0.05 CY3B CY3R 0.03 0.04 Deflection (mm) Deflection (mm) 0.02 CY1S 0.03 0.02 CY1HT32 CY1L 0.02 0.01 0.01 0.01 CY1H CY1H 20 40 0 60 20 40 0 60 20 40 0 60 80 CY1F Moment (Nm) Moment (Nm) Moment (

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

HRX-OM-X071

1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Environment

Nil Without cable 2 2 5 5 A 10 !

MU

5, !6, !7, and !

Vacuum

Bellows type Bellows type 25 8 31 5.5 3.85 5 8.5 8.7 't9 1 0 5 25 6 1 8 20 29 35 9.9 8.5 '106 IPI $eries Wi[r Bulfen ilimsns Pad Diameters a2. s4 . @6 . @8 Pad Dfameters @10. s13. s16 Flat type Flat type 45 Frs* Flat with rib Deep typezPTloD. 16D only r Adaptor plate: Provided as stahdard Flat type 2 2.6 3 5 8 0.8 4 4.8 r 6 3 5 0.8 6 7 2.5 3 5 0.8 2.5 3 6 5 8 1 (sr) Female Th reacl/Weight

CG5-S

GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Vacuum

Bellows type Bellows type 25 8 31 5.5 3.85 5 8.5 8.7 't9 1 0 5 25 6 1 8 20 29 35 9.9 8.5 '106 IPI $eries Wi[r Bulfen ilimsns Pad Diameters a2. s4 . @6 . @8 Pad Dfameters @10. s13. s16 Flat type Flat type 45 Frs* Flat with rib Deep typezPTloD. 16D only ) r Adaptor plate: Provided as stahdard Flat type 2 2.6 3 5 8 0.8 4 4.8 r 6 3 5 0.8 6 7 2.5 3 5 0.8 2.5 3 6 5 8 1 (sr) Female Th reacl/Weight

MU

5, !6, !7, and !

LEC-OM07605CN

LEC-MR-BAT6V1SET/ 3[AL. 25 ] 2. 5 3.

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

JIS Standard Hydraulic Cylinder

5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.