Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

30

/40 40 32/40 50 50/63 5 How to Order 14-150 JC 40 Thread nominal size (Standard) Applicable cylinder bore size Applicable cylinder bore size (mm) Symbol Model Applicable cylinder nominal thread size Thread nominal size 20 30 40 63 8-125 10-125 14-150 18-150 20 25/32 40 50/63 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Standard type Specifications Operating pressure Mounting Operating temperature

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

48

mA or less 2.5 to 40 mA Load current 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

Cylinder with Lock

32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56 20 13 15 12 58 11 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 65 20 18 12 15 58 11 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 79.5 20 23 18 17 71 13 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180 144 21 93.5 22 25 20 19 72 16 With Bellows

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

87 190 35 80 17 20 25 to 1800 100 M18 x 1.5 135 150 102 19 22 22 18 44 44 3/4 75 172 22 20 190 109 230 40 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) FT FY FX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 212 M16 x 1.5 25 22 18

CNA

50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 9 CNS 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 71 81 101 119 133 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123 144 15 17 17 21

CNA

50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 9 CNS 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 71 81 101 119 133 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123 144 15 17 17 21

CNA

50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J CXS 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 71 81 101 119 133 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 9 9 11.5 13.5 13.5 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123

Stroke Reading Cylinder and Counter

175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs. 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.

JXCx-OMT0023

Igm: Leakage current of the servo motor (Found from Fig. 11.4.) 120 Leakage current 100 80 60 40 [mA] 20 0 2 100 5.5 14 38 8 3.5 22 60 150 30 80 Cable size[mm2] Fig. 11.1 Leakage current example (Ig1, Ig2) for CV cable run in metal conduit 11 24 11.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

90

[kPa] 80 Vacuum pressure Suction flow (Silencer exhaust) 60 Air consumption 40 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 Suction flow [L/min (ANR)] ZK215 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 150 100 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 80 120 105 Vacuum pressure

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection