0.4

AXT661ALead wire length (mm) 6 43 Blanking plate with connector Connector Connector lead wire length (mm) 4-wire 2-wire Lead wire color: Black Lead wire color: Red 43 44 Nil 300 600 1000 2000 3000 A C B Nil 300 20 25 30 2000 6 10 20 30 Nil Without connector With connector/2-wire With connector/4-wire 1 2 6 10 15 600 2500 A B 1000 3000 Lead wire color: White 24AWG 1500 Cover O.D. 1.5 Blanking

Plate Cylinder

, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

LEYx-OMZ0015

] 0.1 or less[Basic type] / 0.05 or less[High precision type] Lead[mm] (Including pulley ratio) 12 6 3 20 10 5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

C85

With Rod Boot (mm) Item h AM C e f K KK 1 to 50 Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 109 M8 x 1.25 71 84 96 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY3A MY3B MY1H/m1 MY1H/m2 MY1H/m3 MY3M 50 50 50 40 40 40 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 10 10 10 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 3 3 3 2 2 2 D1 1 1 -X 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

Hydraulic Filters

10 0 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 100 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

e-Rodless Actuator

1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight (kg) Load weight (kg) Load weight (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed

MXW

134 163 7 690 1 MXW25-300 245 395 232 52 60 60 320 159 188 8 740 2 8-7-19 20 Series MXW Construction !

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

HRX-OM-Y098

-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5