5 Port Solenoid Valve SY Series

Vacuum/low pressure combination system is possible. + + + + + + + + SY7 40 EA P EB EA P EB Type 42P Bar stock type/Common External EXH Flat ribbon cable SY3 40 SY5 40 P. 95 A 26 pins MIL connector permits one-touch wiring of external cables in a bundle. Vacuum/low pressure combination system is possible.

Slider Type/Ball Bushing Bearing

7 8.5 54 23 21 M8 x 1.25 10 86 7 90 9 18 52 53 39 20 10.5 14 20 8 33.6 8 16 5 7 9.5 66 26.5 24.5 M10 x 1.5 15 100 9.2 110 12 26.5 64 64 47.5 25 11.5 14 25 8 41.6 10 20 5 10 10.5 78 30.5 28.5 M10 x 1.5 15 136 9.2 130 12 35 76 74 56 30 PA (N) (NA) (NB) ta P PB PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95

RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm RS Q G Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

VXP21/22/23

97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 84 (94) 95(105) 106(117) 2 VXP2382 VXP2392 1 12 44.5 44.5 ( ): N.O. 17-3-51 10 The VX series will be revised shortly.

2/3 Port Valve for Various

132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 48 50 50 84 (94) 95(105) 106(117) 95 97 97 62 64 64 2 VXP2382 VXP2392 1 12 44.5 44.5 ( ): N.O. 17-3-51 The VX series will be revised shortly.

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

JXCx-OMT0001CN

-107No.JXC-OMT0001CN-C 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 mm/s 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] () 15 8 4 18 9 5 24 12 6 24 12 6 [mm/s] () 22 12 6 26 13 7 34 17 9 34 17 9 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20

JXCx-OMT0002

Electric Actuators / Common Precautions . 95 15.1 Design and Selection . 95 15.2 Mounting . 96 15.3 Handling Precautions . 96 15.4 Operating environment . 98 15.5 Maintenance and Precautions . 98 15.6 Precautions for actuator with lock . 99 16.

SFOD-OMT0010

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke [mm] 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and 15 8 4 18 9 5 24 12 6 24

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

/VQZ 95 ,N.O.) Valve Mounting 1 2 3 1 2 3 0 1 0 1 After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below. When a 3 port valve is mounted on a 5 port manifold, The "A" port is the working port. The "B"port can either be plugged or unplugged.

Air Cylinder

Operating Range Bore size Auto switch model Bore size (mm) Auto switch model 5 6 8 5 6 8 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL 11.5 12.5 12 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL BS5-125 BS5-125 BS5-160 6.5 6.5 6 * Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

LEC-OM02704CN

9.4 97 9.5 9-11 9.6 9-11 9.6.1 9-11 9.6.2 9-12 9.6.3 9-13 9.6.4 9-15 10 10110-16 10.1 102 10.2 103 10.3 CC-Link 103 10.4 104 10.4.1 104 10.4.2 105 10.4.3 10-14 10.5 10-16 11 1-5 11.1 112 11.2 114 12 121128 12.1 122 12.2 123 12.3 125 12.3.1 125 12.3.2 126 12.4 127 12.5 128 13 13113-31 13.1 132 13.1.1 132 13.1.2 134 5 - 13.1.3 136

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4

3

75 85 95 85 95 105 125 80 90 100 120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in the table below. 10.5 Bore

Vacuum Pad

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(sbar)].

Vacuum Pad

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(sbar)].

Vacuum Pad

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(sbar)].

Compact Cylinder

-100 M8 x 60L x 135L 60 135 15 CVQB405 x 65L M5 x 45L 65 45 20 10 x 70L x 50L 70 50 25 15 x 75L x 55L 75 55 30 20 x 80L x 60L 80 60 35 25 14.5 x 85L x 65L 85 65 40 30 x 90L x 70L 90 70 7.5 45 35 x 95L x 75L 95 75 50 40 x 100L x 80L 100 80 75 45 x 125L x 85L 125 85 -100 50 x 150L x 90L 150 90 75 x 115L 115 -100 x 140L 140 3 Series CVQ Allowable Kinetic Energy Rod End Allowable Lateral Load