MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Air Cylinder

CS2 [mm] Dimensions other than the table below are the same as those on page 50.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 500 1000 Not available with air cushion. Other strokes available on request.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

1.1

Hz) 220 to 240 VAC (60 Hz) 5 HRG0024 kVA 380, 400, 415 VAC (50 Hz) 380 to 440 VAC (60 Hz) 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) 3-phase single HRG0057 kVA 6 HRG01014 kVA 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) HRG0157 18 kVA 3-phase double 220, 240, 380, 400, 415, 440 VAC (50/60 Hz) 8 200 VAC (50/60 Hz) Note) Refer to page 32 for dimensions.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Solid State Auto Switches

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

HRX-OM-Z002

Table 8-1 Water quality criteria for clear water (tap water) Item Unit Standard value For circulating fluid For facility water pH (25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

CNA

100 100 100 MGF 50 50 50 40 40 40 200 200 80 80 80 63 63 63 100 100 CY1 50 50 50 Load weight m(kg) Load weight m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

Digital Gap Checker ( compatible)

to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200 to 151) (150 to 101) (100 to 51) ISA3-F ISA3-G X+750 Process X+500 X+250 X (250 to 0) 250 (1000 to 751) (750 to 501) (500 to 251) data ISA3-H : The value in the brackets in level 2 shows the boundary value. -66No.PS-OMW0009-C 4 How to use X: Switch point is divided by weight.

Uniaxial Electric Actuator Series LJ1

100% Horizontal load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 5 5 Lateral load 100% Lateral load 50% Lateral load 100% Lateral load 50% 1 2 1 2 0.5 0.5 Horizontal empty weight deflection Lateral empty weight deflection Horizontal empty weight deflection Lateral empty weight deflection 0.1 0.2 0.1 0.2 100 200 300 500 1000 100 200 300 500 1000 Load point

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

Dual Rod Cylinder Series CXSJ/CXS

-100 CXSW20-125 CXSW20-150 CXSW20-175 CXSW20-200 120 178 60 10 130 198 70 20 44.5 44.5 Standard stroke Long stroke (-XB11) 140 30 218 80 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) 150 238 40 90 (Opposite side: Same) 160 258 100 50 (Z) (30) 6 (30) 4 x M4 x 0.7 thread depth 6 2 x M6 x 1 thread depth 10 185 308 75 125 210 358 150 100 235 408 125 175 260 458 150 200 50 0.2 285 508 225 175

Booster Regulator/Air Tank

50 Drain port 1/4 100 200 100 400 674 200 696 (mm) A 481 520 444 477 B 394 429.8 394 429.8 C 3/8 1/2 3/8 1/2 D Note) 469 493 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.