High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Purity Chemical Valve

M5 x 0.8 M3 x 0.5 46.5 31 67.5 67 19 41.5 13 18 36.5 11.5 19 34 M4 5.5 219 266 313 360 47 36.5 93.5 76 27.5 57.5 17.5 39 53.5 24 27.5 47 M5 6.5 118 177 236 295 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LLC5A 60 47 111.5 95 33.5 70.5 18 50 63.5 29 33.5 56 M6 7.5 130 189 248 307 75 59 131 114 33.5 70 27.5 62 64 34.5 27.5 56.5 M6 7.5 240 299 358 417 468 Series LVC 3 Port Standard Specifications LVC200

LG1H

Maximum acceleration: 3000 mm/s2 1 10 100 200 400 Positioning distance (mm) 10 0.5 1.4 10.4 20.4 40.4 100 0.5 0.6 1.5 2.5 4.5 Speed (mm/s) 250 0.5 0.6 0.9 1.3 2.1 500 0.5 0.6 0.8 1.0 1.4 A B C D Values will vary slightly depending on the operating conditions. 49 Standard Motor/ Horizontal Mount With Coupling Motor Output High Rigidity Direct Acting Ground Ball Screw 100 W 15 mm /20 mm lead

AHC System Series MA

x 12 (3 included) 3.5 0 0.03 3 x 3 (A, B, C common view) 0 0.03 +0.022 0 depth 6 3.5 6 x M2 x 0.4 thread depth 4 (A, B, C common view) 3 0 0.02 3 Open: 22, Closed 14 0 0.02 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15: MHR2-15-A210 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) Hexagon socket head cap screw M3 x 12 (3 included) Mass: 130

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

EtherNet/IP TM Compatible Fieldbus System

Item Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 130 130 (5) Size: Perform setting as shown below.

Air Slide Table

Use the collision speed when calculating dynamic moment. 32 32 32 32 52 140 130 140 130 78 130 52 81 81 81 81 110 110 Symbol Definition Average speed Load weight Allowable load weight Weight equivalent to impact Max. allowable load weight Load factor Symbol Definition Unit mm J J mm Nm Nm Nm Nm Nm mm/s Symbol Va W Wa We Wmax K Unit mm/s kg kg kg kg An (n = 1 to 6) E Emax Ln (n = 1 to 3) M

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

CKZ2N

3097 6372 160 400 880 1416 3540 7788 190 450 1040 1681 3982 9204 220 500 1200 1947 4425 10619 250 550 1360 2212 4867 12035 at 0.5MPa Cylinder Stroke Unit: (mm) Angle 30 45 60 75 90 105 120 135 Bore size 50 63 80 61.9 66.8 95.7 54.1 58.6 83.2 31.1 34.1 47.3 38.9 42.5 59.4 46.4 50.5 71.1 69.6 74.7 108.0 76.4 81.5 119.1 81.3 86.3 127.3 To determine actual clamp force.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130

Refrigerated Air Dryer

Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(10C) IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12(20) ZFC NPT1/2 15(25) 16(27) 17(28) 25(43) 26(45) 28(47) SF 100F (37.8C) 100psi (0.7MPa) NPT3/4 41(70) 43(74) 45(77) 59(100) 62(106) 65(110) SFD 71(120) 80(136) 86(147) NPT1 107(182) 120(205) 130

Brake mechanism added

11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5 25 0.1 0.3 +0.3 +0.1 0.040 0.073 +0.084 0 25 18 116 150 92 180 13.5 133 140 58 25 23.5 36 430 64 162 214 309 0.1 0.3 +0.3 +0.1 0.040 0.073 35.5 35.5 25 Mounting Bracket Part No. 40 50 63 80 100 Bore size (mm) Foot CA1-L04

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 C8 Stations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 137.5 150 175 187.5 200 225 237.5 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45FUStations B-Q 2 3 4 5 6 7 8 9 10 Stations n L1 L2 L3 L4 148 173 185.5 198 210.5 235.5 248 260.5 285.5 137.5 162.5 175 187.5 200 225 237.5 250 275 123 139 155

SY

Scale: 35% For 45PG (20 pins) For 45PH (10 pins) 2 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 135.5 148 160.5 185.5 198 210.5 235.5 248 260.5 125 150 137.5 175 187.5 200 237.5 225 250 105 121 137 153 169 185 201 217 233 15 13.5 11.5 16 14.5 12.5 17 15.5 13.5 C4 C6 C8 SS5Y5-45PUStations B(26 pins) 2 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 285.5 260.5 248 235.5 210.5 198 185.5 173 148 275 250

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n : Stations L n 2 135.5 125 93.5 24.5 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 4 148 137.5 114.5 20 3 135.5 125 104 19 L1