MXQ

300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25-30 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-50 MXQ25-50 MXQ25-75 MXQ25-75 0.12 0.10 MXQ25-75 MXQ25-75 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 Table displacement amount

CLQ

200 Warning 1.

%silltr

n) t5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

SMC Basic Pneumatics

n) t 5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

Electric Actuator / Low profile slider type

output signal is turned on from Area 1:80[mm] between Area 2:90[mm].

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

HRL

100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 148 160.5 173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 135.5 137.5 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 125 112.7 123.2

CRBU

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 180 270 180 270 270 90 270 90 180 270 90 180 Rotating angle Single vane Double vane 469 47.1 47.5 258 255 491 480 47 73 72 72 143 142 140 263 Body of rotary actuator Auto switch unit + 2 switches 30 60 46.5 50 30 Angle adjuster 30 150 203 47 90 90 90 100 90 100 100 100 90 100 90 Rotating angle 158 308

AC Servo Motor Driver (CC-Link Type)

225 60 90 180 Home position return position data (m) PC07 0 -2000(Less than stroke 1000) / -200(Stroke 1000 or more) Stopper type home position return PC09 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PC10 15 24 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode

39

, 75 , 90 , 105 A photograph shows handle unit L.

0.4

225 235.5 8 159 188.5 212.5 223 7 147.5 177 200 210.5 6 136 165.5 187.5 198 5 124.5 154 175 185.5 4 113 142.5 162.5 173 3 101.5 131 162.5 173 2 90 119.5 150 160.5 1 78.5 108 137.5 148 L1 L2 L3 L4 19 EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ2000 [Option] How to Order Manifold SS5Q SB 3 2 08 D CE compliant Manifold series Nil Q CE compliant 2 SQ2000 1(P), 3(R) port

Series AK1000

to 3000 psig (1.4 to 20.7 MPa) 100 0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 50 0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

SQ1000/2000

225 235.5 8 159 188.5 212.5 223 7 147.5 177 200 210.5 6 136 165.5 187.5 198 5 124.5 154 175 185.5 4 113 142.5 162.5 173 3 101.5 131 162.5 173 2 90 119.5 150 160.5 1 78.5 108 137.5 148 L1 L2 L3 L4 18 Series SQ2000 Plug-in Type How to Order Manifolds SS5Q23 08 FD2 D Option Stations Nil None 02 to 24 B K N R S Specified DIN rail length Note 1) 01 1 station With back pressure check valve Note

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

IZx-OMP0064

With high speed static neutralization cartridge, Supply pressure: 0.1 MPa (Per one cartridge: 8.6L/min (ANR)) Frequency: 30Hz Ionizer installation distance: 600mm 90 3 60 Without sensor Discharge time [s] Offset voltage [V] Specified value: +/30V 2 30 0 1 -30 With feedback sensor -60 0 -90 0 100 200 300 400 500 0 100 200 300 400 500 Feedback sensor installation height [mm] Feedback sensor

CE

14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8

Industrial Filters

840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions. 0.3 0.5 0.7 90 IN 27 45 63 5.2 12 CU 113 OUT 34 57 79 168 IN 50 84 117 6.2 16 CQS 201 OUT 60 101 141 Snap Ring Installation/Removal Caution 256 IN 77 128 179 CQ2 8.2 20 314 OUT 94 157 220 401 IN 120 200 281 MU 10.2 25 q For installation and removal, use an appropriate pair of pliers (tool for installing a C type