Low Profile Slide Table Series MXF

F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

96 110 100 120 140 0 1 3 24 32 36 63.5 75.5 88 to 1000 to 1000 to 1000 Front flange type (F) 4-FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25

MXF

100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20-75 MXF20-100 MXF20-75 MXF20-50 MXF20-30 0.12 MXF20-30 0.04 0.04 MXF20-50 0.08 MXF20-30 0.02 0.02 0.04 0 0

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Applicable cable O.D. 3.5 to 7 3 80 68 6 137 125 8 175 163 10 213 201 4 99 87 Stations n L1 L2 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 2 stations 61 49 20 stations 403 391 694 Manifold specifications 10-SYJ700 Type 40 manifold: Bottom ported / 10-SS3YJ7-40Stations 01 [ ]: AC Grommet (G) Air cylinder

Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Single Axis Electric Actuator Serriies LJ1S Slider Guide

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23 mm2 300 61.5 <66.5> Indicator light 1 P 3 R < >: AC Formula L1 = 19n + 11 L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 49 61 87.5 98 68 80

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 L1 L2 L3 L4 2.10-16 VQZ100/200/300 Body Ported Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 This is used when removing the valve for maintenance, or reserving a valve mounting space on the manifold for future use.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

Locking direction Maximum operating pressure Unlocking port size 50 Spring locking (exhaust locking) 0.2MPa or more (29 psi) 0.05MPa or less (72 psi) One direction (extension locking, retraction locking) 1.0MPa (145 psi) Rc 1/8 40 63 Holding force N (lbf) (maximum static load) 982 (220) 629 (141) 1559 (350) Standard Strokes Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175

CRBU

Symbol Change of shaft end shape -XA1 to XA47 1 Patterns of non-standard shaft forms Applicable patterns A wide selection of models is now available, as non-standard shaft configurations for the CRB1 Series (Sizes: 50, 80, 100) are provided in 46 types of patterns.

Rotary Actuator/Vane Type

CRA1 Flat surface Piping port CRQ2 Shaft-end shape With angle adjuster unit MSQ + With auto switch unit With angle adjuster unit With auto switch unit MSZ Possible to adjust the angle as desired CRQ2X MSQX Rotating angle Rotating angle adjustment range 270 0 to 240 (Size 30) MRQ 180 0 to 175 90 0 to 85 Auto switch unit Angle adjuster unit Free mount type/CRBU2 Series 12% weight reduction

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Bore size 20 25 32 40 50 63 80 100 Auto switch 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Nil Without auto switch (Built-in magnet) Port thread type 20, 25 M thread Rc NPT G Refer to table below for selection of applicable auto switch.

Electric Actuator

Compared with SMC LJ1 series (Work load: 10 kg) 80 40 40 90 Equipped with seal bands as standard 40 40 Covers the guide, ball screw and belt. Prevents grease from splashing and external foreign matter from entering.

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

For details, refer to page 175.

Digital Gap Checker ( compatible)

(When the pressure after the adjustment is below the supply pressure lower limit (80 kPa) or exceeds the display set range upper limit (220 kPa)). Keep the SUP port pressure and OUT port pressure the same and perform fine adjustment of the pressure display value. Set the pressure within 80 kPa to 220 kPa.

7

series Cylinder stroke (mm) 80 100 50, 75, 100, 125, 150, 175, 200 50, 75, 100, 125, 150, 175, 200 CKGA series End bracket Nil Y None Double knuckle joint (with tap) CKPA series Note) A knuckle pin, cotter pins and flat washers are provided as a standard for Y.