17

-300 0.5 0.3 MGPA80-250 MGPA80-200 0.4 0.25 MGPA20-200 0.2 MGPA20-150 0.3 MGPA80-100 MGPA80-150 0.15 MGPA20-100 0.2 0.1 MGPA20-50 MGPA80-50 0.1 0.05 0 0 0 20 40 60 0 50 100 150 200 Load from lateral direction (N) Load from lateral direction (N) MGPA25 MGPA100 0.6 Plate displacement amount (mm) Plate displacement amount (mm) 0.7 MGPA100-400 0.6 0.5 MGPA25-400 MGPA100-300 MGPA100-250 0.5 MGPA25

e-Rodless Actuator

E-MY2H/M2 E-MY2H/M3 50 60 50 60 50 60 30 30 30 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 4 4 4 3 3 3 E-MY2H16 E-MY2H16 2 2 2 E-MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2H E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 50 60 60 50 50 30 30 30 20 20

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Air Slide Table Series MXQ

150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-50 MXQ20

Profile Design ISO/VDMA Air Cylinder Series CP95

A B C D E F G H P U Load [kN] Weight [g] Angle 32 M10x1.25 JA30-10-125 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 40 M12x1.25 JA40-12-125 60 20 31 6 11 11 22 13 0.75 4.4 160 5 50/63 M16x1.5 JA50-16-150 71.5 22 41 7.5 14 13.5 27 15 1.0 11 300 80/100 M20x1.5 JAH50-20-150 101 28 31 59.5 11.5 24 16 32 18 2.0 18 1080 Rod clevis GKM (DIN 71752), supplied with bolt and safety device Chromed steel Bore

Compact Manifold Regulator

80 100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

LEC-OM07605CN

P+C UVW L1L2L3 (2) LECSS2-T5LECSS2-T7 LECSS2-T8LECSS2-T9 14 14 14 14 1. 2. 1. 5 . (2) a FVD5.5-4 YNT-1210S b(1) 8-4NS YHT-8S c FVD2-4 YNT-1614 d FVD14-6 YF-1 YNE-38 DH-122 DH-112 e FVD5.5-6 YNT-1210S f FVD22-6 YF-1 YNE-38 DH-123 DH-113 JST g FVD38-6 YF-1 YNE-38 DH-124 DH-114 h R60-8 YF-1 YET-60-1 TD-125 TD-113 i FVD5.5-8 YNT-1210S j CB70-S8 YF-1 YET-150-1 TD-226 TD-213 1. 2.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

Industrial Filters

1580 1980 100 150 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 500 24 375 163 675 500 300 850 1120 1575 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 750 24 435 216 675 500 300 850 1380 1835 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 1000 24 495 269 675 500 300 850 1640 2095 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 870

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10

Digital Gap Checker ( compatible)

Relationship between boundary value and display value of the level bar/switch point value bar and process data Distance type Level 1 Level 2 Level 3 Level 4 Level 4 60 or less (60 to 36) X+30 X+25 X+20 ISA-F (35 to 31) (30 to 26) (25 to 21) ISA3-G 300 or less X+150 X+125 X+100 Display (300 to 176) (175 to 151) (150 to 126) (125 to 101) value ISA3-H 500 or less X+300 X+250 X+200 Constantly

Parallel Style Air Gripper: Wide Type Series MHL2

68 98 585 60 60 110 170 795 16 40 80 130 210 935 40 82 122 1025 60 80 142 222 1495 20 40 100 162 262 1690 50 100 150 1690 60 100 182 282 2560 25 MHZ 40 120 200 320 2775 70 150 220 2905 30 MHF 120 198 318 3820 32 20 MHL 160 242 402 4655 100 188 288 5270 30 JIS Symbol MHR 160 246 406 6830 40 20 200 286 486 7905 MHK Note) The open and close time spans represent the value when the exterior of

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

MTS

(kg) Weight W (kg) 40 32 32 1 1 25 20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

34 63.5 53 52 47 40 32 25 20 10 12 11 14 40 45 55 65 50 63 80 100 70.5 82.5 101 121 5 5 6 6 55 (67) 55 (67) 60 (74) 60 (74) 75.5 75.5 95 95 157.5 (169.5) 157.5 (169.5) 188.5 (202.5) 192 (206) 4.5 4.5 4.5 6 66 82 100 120 5 5 5 7 17.5 17.5 20 20 22 22 28.5 30 11 13 14 16 86 106 125 150 Other dimensions are the same as basic type.

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

LEH_C

LEHS 4.1 LEHS10 LEHS20 LEHS32 LEHS40 / (mm) 4 6 8 12 (mm) 255/76 235/56 235/40 235/40 2.25.5 922 3690 52130 (N) 40100 1) 3) 1.43.5 717 /(mm/s) 2) 3) 570 /550 580 /550 5100 /550 5120 /550 (mm) 4) 0.02 (mm) 5) 0.05 /(mm) 6) 0.5 / (m/sec 2) 7) 150 30 (c.p.m) 60 () 540 (%RH) 90 () 185 410 975 1265 (g) 150 345 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 /