MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Free Mount Cylinder Series CU

CUJ (g) Heat resistant (10 to 150C) -XB6 Stroke (mm) Cold resistant ( 40 to 700C) -XB7 Bore size (mm) CU 5 10 15 20 25 30 40 50 -XB9 Low speed (10 to 50 mm/s) -XB13 Low speed (5 to 50 mm/s) 28 (33) 31 (41) 34 (44) 37 (47) 40 (50) 43 (53) C(D)UK6-D CQS -XC19 Intermediate stroke (5 mm spacer) -XC22 Fluororubber seals 43 (48) 47 (57) 51 (61) 55 (65) 59 (69) 63 (73) C(D)UK10-D CQ2 Non-rotating

AC Servo Motor Driver (Network card type ）

Note that setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the time of 50% or more oscillation level.

ISO Standard Hydraulic Cylinder

/A6/A59W cannot be mounted to 40, 50.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches 32 40 50 63 80 100 2 (Same surface) 50 D-M9l D-M9lW 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-M9lV D-M9lWV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 55 50 D-M9lA 1, 2 (Different surfaces) 15 10 n 15 + 40 (n 2) 10 + 40 (n 2) 2 (Same surface) 40 D-M9lAV 1,

XL

XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Sine Rodless Cylinder Series REA/REB

Stroke (mm) Bore size 25 25 mm Port thread type 32 32 mm Bore size 25, 32, 40 50, 63 32, 50, 63 Type Rc NPT G Symbol Nil TN TF 40 40 mm 50 50 mm 63 63 mm Specifications 25 32 40 50 63 Bore size (mm) Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.7 MPa Minimum operating pressure 0.18 MPa 10 to 60C (No freezing) Ambient and fluid temperature Piston speed (Max.)

Refrigerated Air Dryers Series IDF/IDU

(C) Correction factor 1.21 5 to 45 50 55 60 65 70 75 80 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 HAA HAW 1 1.25 1.00 1.07 1.10 0.82 1 0.83 1 1 AT 0.68 0.8 0.70 0.95 0.87 0.57 0.6 0.60 0.9 0.76 IDF IDU 0.86 0.74 0.82 0.72 IDFA 0.79 0.70 Data B: Ambient Temperature IDFB Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E ID IDU55E, 75E IDF120D

High Vacuum Angle Valve, XL Series

XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Electric Slide Tables

/75 LES8-50 LES8-50 0.001 0.05 0.01 LES8-30 0 10 20 30 0.00 0 10 20 30 0.000 0.00 0 5 10 15 Load [N] Load [N] Load [N] LES16 LES16 LES16 Lr = 60 mm 0.10 0.40 0.012 LES16-100 LES16-30 LES16-100 0.08 0.30 LES16-75 0.008 LES16-50 0.06 LES16-75 0.20 LES16-50 0.04 LES16-50 0.004 LES16-30 0.10 LES16-75/100 0.02 LES16-30 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.000 0 10 20 30 40 Load [N] Load [N]

Compact Cylinder with Lock Series CLQ

Bore size (mm) 32, 40 50, 63 80 100 B D E F M T1 T2 Part no. CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

Clamp Cylinder with Lock

(Same surface) 10.5 16.5 D-A93 50 50 50 D-M9B D-M9BW D-B54 50 50 75 8.5 Auto Switch Mounting Position and Its Height Unit: mm Auto switch set value and its height 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 Auto switch D-B54 Symbol 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 32 3 30.5 30 7 34.5 30 0 25 33.5 Hs A B Hs A B Hs A B Hs B A 33 D-A93 D-M9B D-M9BW 24.5

CHKD/CHKG

JIS Standard Compact Hydraulic Cylinder Compact Hydraulic Cylinder CHKD/CHKG Series CHQ CHK CHK CHN CHM CHS CHKD Series CH2 CHA Related Products DNominal pressure: 10 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 CHKG Series Nominal pressure: 16 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 263 JIS Standard Compact Hydraulic Cylinder 20, 25, 32, 40, 50, 63, 80, 100 CHKD Series

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

) H J I Stroke 20 3 +10 0 30 +7 +20 50 +52 +40 +25 13-11-116