HRX-OM-X071

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Air Cylinder

CM3 CG1 Symbol Specifications -X446 PTFE grease -X773*1 Short pitch mounting Standard Strokes CG3 [mm] -X2838*2 Double clevis (With one-touch connecting pin) Bore size Standard stroke Maximum manufacturable stroke 6 15, 30, 45, 60 200 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 *1: 6 only *2: 10 and 16 only Made to Order Click here for details

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

Thermo-chiller

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box: IPX4 CH1 0.1 15 to 25 V HRLE Basic dual type V (CH1, 2 (CH1, 2 Scheduled to acquire UL Standards (Only 400 V) CH2 0.5 CH1 +0 to 15 total) total) V V V HRL Inverter dual type CH1 0.1 15 to

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

ITV

Note 8) Add 50 g for digital input type, 70 g for 16 points preset input type respectively.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

JXCx-OMT0034CN

ID Bit[70] 3 RWrn 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWrn+1 1) Bit[F8] 0 Bit[70] H RWrn+2 1) 2 065500 mm/s Bit[F8] L Bit[70] H RWrn+3 1) 2 0300 % Bit[F8] L Bit[70] 3 RWrn+4 1) Bit[F8] 2 ID1 4 2147483647 0.01mm Bit[70] 1 RWrn+5 1) Bit[F8] 0 Bit[70] 0 0255 RWrn+6 1) Bit[F8] 1 0255 4 Bit[70] 2 0255 RWrn+7 1) Bit[F8] 3 0255 RWrn+8 IF (ID=1) ID2 RWrn+917 ID1 ID3 RWrn+1826

VQ4000

KG 72309-0114-70-15, etc.

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

53

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating fluid Note 2) Tap water, 15%

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

HRX-OM-X037

Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

HRX-OM-R039

Power supply 200/230V : 40C Installation of multiple products Keep sufficient space between products so that the air vented from one product will not be taken in by other products.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Modular/F.R.L. Units Series AC

220 48 75 40 9 9 18 195 194 50 4.6 226 200 220 48 80 40 9 11 20 272 271 70 6.4 303 276 296 60 96 50 11 11 20 287 286 70 6.4 318 292 312 60 96 50 11 11 20 288 287 70 6.4 319 293 313 60 101 50 11 Note) For the AC20 only, the position of the pressure gauge is above the center of the piping. 304 Air Combination Filter Regulator + Lubricator AC10A to AC60A JIS Symbol Filter Regulator Lubricator

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Lightweight and Compact

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard.

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175