7

Note 2) Only available for clevis width A (16.5 mm) Thread type 40 50 63 40 mm 50 mm 63 mm Nil TN TF Rc1/4 NPT1/4 G1/4 None End bracket Nil Single knuckle joint (M6 without tap) Single knuckle joint (M6 with tap) Double knuckle joint (M6 without tap) Double knuckle joint (M6 with tap) I IA Y YA Cylinder stroke (mm) 40 50 63 50, 75, 100, 125, 150 50, 75, 100, 125, 150, 200 50, 75, 100, 125

HRS100/150

Pump Capacity HRS100/150-Am-20/40-m HRS100/150-Wm-20/40-m 0.5 50 Circulating fluid pressure [MPa] HRS Circulating fluid outlet (60 Hz) Usable range (50 Hz) 0.4 40 HRS 090 Pump head [m] 0.3 30 Usable range (60 Hz) HRS 100/150 HRS 100/150 Circulating fluid outlet (50 Hz) 0.2 20 HRSH 090 Circulating fluid return port 0.1 10 HRSH 0 0 0 10 20 30 40 50 60 70 HRSE Circulating fluid flow rate [L

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

58

(Different surfaces, Same surface), With 1 pc. 100 15 105 110 D-A9 110 + 40(n 4) 2 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 100 + 40(n 4) 2 105 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 75 10 80 85 D-A9V 75 + 30(n 4) 2 85 + 30(n 4) 2 80 + 30(n 4) 2 10 + 30(n 2) 2 With n pcs.

15

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 23 Digital Flow Switch Series PF2W For Water Dimensions: Remote Type Display Unit for Water PF2W3-A Panel mounting type Internal circuits and wiring examples to are the terminal numbers.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

Possible to transfer a workpiece at low-speed.

mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement MSQXB10A MSQXB20A 300 400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed

LEC-OM02704CN

-(A534G) CT160-3-TMH5B () LE-CSB-RA LE-CSB-RB 13 8 13 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR -BK S1CBL M-A1-H MR -BK S1CBL M-A 2 H MR-BKS2CBL03M-A1-L MR -BK S2CBL 03 M-A 2 L ( ) AWG 20 B1 AWG 20 B2 . 13 9 13 13.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

JA/JAH/JB/JS

80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

One-touch Fittings

Possible to use in vacuum to 100 kPa.

C95Series

d80 . %100 0 . 3 ~ "32 0. 1 8 "SO 0.58 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, SOD, 600 Allowable rotating torque "40 0.33 " 100 0.69 . ft Ibs max . . : 63 25,50,75,1 00,125,1 50 ,175,200, %50,.063 0.47 250, 300.350,400,450,500, 600 sr 25, so, 75. 100, 125. 150, 175 ,200,250, 300,350, 400, 450, 500, 600, 700 Nole 1) AbsOfbabte kinshc energy by cushIOn mechanIsm IS