100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

Air Cylinder

30 31 30 34 30 30 30 30 30 38 30 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 34 34 35 34 38 34 34 34 34 34 42 34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5

Modular Design with Uniform Body Style

-D IS10M-40-D IS10M-50-D IS10M-60-D p. 54 Slim type IS10M-20-1-D IS10M-30-1-D IS10M-40-1-D IS10M-50-1-D IS10M-60-1-D IS10T-50-m02-D IS10T-50-m03-D IS10T-50-m04-D IS10T-50-m06-D IS10T-30-m01-D IS10T-30-m02-D IS10T-30-m03-D IS10T-40-m02-D IS10T-40-m03-D IS10T-40-m04-D IS10T-60-m03-D IS10T-60-m04-D IS10T-60-m06-D Pressure switch with T-spacer*5, *6 p. 55 IS10T-20-m01-D IS10T-20-m02-D IS10L-30

48

to 200 30 to 300 30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

Rotary Clamp Cylinders

Note 4) Piston speed is ranged from 50 to 200 mm/s. How to Order XB6 MK series standard model no.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Air Catch Sensor Series ISA

Prefix the part number of the air catch sensor with an asterisk (). 795 Series ISA2 Specifications ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Model Detection distance Fluid Operating pressure range Recommended detection nozzle 0.01 to 0.25 mm 0.03 to 0.50 mm Dry air (filtered to 5 m) 30 to 200 kPa 1.5 5 or less 8 or less 12 or less 50 to 200 kPa 2.0 10 or less 15 or less 22 or less 50 kPa 100 kPa 200

58

A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R ball AL MM 30 30 DA C R ball TP R ball A A H C H T W1 H H H Symbol:A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 DA MM 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol:

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

REC

41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 200 to 1000 NN P RR S U Z ZZ NA Bore size Stroke range 1 8 150 to 700 20 M20 X 1.5 9 146 14 217 226 30 1 8 1 8 1 4 150 to 700 M26 X 1.5 25 9

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting

Refrigerated Thermo-chiller

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 Refer to page 94.

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

Series CQ2

10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 Minimum Strokes for Auto Switch Mounting Unit: mm (in) D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

to 10 30 to 10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Note) The operating range for grippers is measured when both ends are open.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

Support Guide/11-LEFG Series

40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg]