Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil H Without connector With connector Nil A1 A2 B1 B2 C1 C2 S1 S2 Nil S R Nil 2 5 A Without cable 2 m 5 m 10 m Without cable Standard cable Robotic cable (Flexible cable) Power supply voltage (V) Compatible drivers 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 Without driver LECSA1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N)

Table of Contents

mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

Vacuum Unit

135 150 165 L2 45 60 75 90 105 120 135 150 165 180 L3 56.8 71.8 86.8 101.8 116.8 131.8 146.8 161.8 176.8 191.8 L4 67.5 82.5 97.5 112.5 127.5 142.5 157.5 172.5 187.5 202.5 L5 62.5 75 87.5 112.5 125 137.5 150 162.5 187.5 200 L6 73 85.5 98 123 135.5 148 160.5 173 198 210.5 Metric size 06 8.3 4 9.7 8.7 08 11.4 6 Inch size 07 9.7 4.76 12.3 11.3 09 11.4 6 1 Common pilot pressure supply (PS

Compact Manifold Regulator Series ARM5

250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet

Rotary Actuator/Vane Style Series CRB2

CRQ2X MSQX MRQ Example 3 The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4. Example 4 The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 3-2 of Example 3.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

Escapements Series MIW/MIS

320 0.7 MPa 500 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa 300 0.2 MPa 160 80 120 200 80 40 100 40 40 120 100 80 60 180 140 100 60 240 200 160 120 80 Point of application L (mm) Point of application L (mm) Point of application

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Refrigerated Air dryer Series IDU/IDF

phase 200 to 240VAC is "S" specification standard.

CKZ2N

Arm Mounting Position: A, B, C, D A B C D Arm opening angle 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 denotes tool attachment surface.

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Guide Cylinder/Compact Type Series MGC

Cutout window AM MGQ View A-A MGG Mounting dimensions MGC (mm) Bore size (mm) Stroke range (mm) MGF A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K M N L 20 25 32 40 50 80 84 75 90 6.6 9 60 75, 100, 125, 150, 200 12 13 105 120 55 110 M6 22 106 25 44 38 25 MGZ 95 89 16 13 120 136 84 100 9 9 65 125 M8 27 120 30 52 70 46 32 105 94 16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100

HRX-OM-W060

0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow [L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20 CH2 0.6 0.5 Pressure [MPa] 0.4 Circulating fluid outlet 0.3 Usable flow rate range 0.2 Circulating fluid return 0.1 0.0 0 2 4 6 8 10 12 14 16 18 Circulating fluid flow[L/min] Fig. 8-12 Pump capacity(HRL100/200/300-A-20 CH2) 8.5 Pump

1.1

VAC (50 Hz) 200 to 220 VAC (60 Hz) 3-phase single HRG0057 kVA 6 HRG01014 kVA 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) HRG0157 18 kVA 3-phase double 220, 240, 380, 400, 415, 440 VAC (50/60 Hz) 8 200 VAC (50/60 Hz) Note) Refer to page 32 for dimensions.

CG5-S

80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.