High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

VQ7-6/7-8

Change of electrical entry (Orientation) After separating terminal block and housing, the cord entry direction can be changed by attaching the housing in the desired direction (4 directions in 90 increments). Precautions Pull a connector out vertically, never at an angle.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Martensitic stainless steel used for the body and guide block. 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 Stroke adjuster 10 Three types available: Rubber stopper, Metal stopper and Shock absorber. 20 Shown with shock absorber 30 40 50 60 70 80 90 Highly flexible piping methods 100 Auto switch capable Two types can be selected, side and axial.

OMR0031

Troubleshooting . 90 4 - 18.1 Operation errors . 90 18.2 Position-Speed-Pushing Force errors . 93 18.3 Configuration software . 95 5 - LATCA Series Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 L1 L2 L3 L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MHL2

As a rough guide, tighten the screw an additional 90 after feeling a tight resistance. As a rule, it should be turned about 90 beyond the point at which tightening can be felt. 0.5 0.2 0.3 MHL2-20D 0.5 0.2 0.2 MHC MHL2-25D 0.2 0.1 0.2 MHL2-32D 0.4 0.4 0.7 MHT MHL2-40D 0.2 0.4 0.7 MHY MHW MRHQ Misc.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90.

LEC-OM02704CN

300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15 0.5 LECSC-S8 LE-S80.9 35 15 0.7 1.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Thermo-con/Rack Mount Type

Peltier-type Chiller Thermo-con/Rack Mount Type Air-cooled Water-cooled Reduced by approx. 90% (UL Standards) Exhaust heat 2500 W The water-cooled type has been added. (800 W, 1.2 kW) Exhaust heat 250 W RoHS Reduces the amount of exhaust heat by 90% Suppresses rises in the ambient temperature 1.2 kW type Water-cooled 1 kW type Air-cooled Space-saving design with reduced height 267 mm 221

HRX-OM-X037

Table 3.1-1 Weight of the product Model Weight kg Option increase HRL100-A-40 Approx.240 Option-D1:+1kg HRL200-A-40 Approx.260 Option-T2:+1kg HRL300-A-40 Approx.330 Option-T3:+18kg* HRL100-W-40 Approx.250 HRL200-W-40 Approx.250 *Applicable only to HRL300-A*-40. 3.1 Transport HRL Series 3-2 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.1.2 Transportation using casters This is a heavy product

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

SYJ300/500/700

Station n L1 L2 L3 Station 2 58 49 43 3 74 65 59 Station 20 346 337 331 4 90 81 75 5 106 97 91 6 122 113 107 7 138 129 123 8 154 145 139 9 170 161 155 10 186 177 171 11 202 193 187 12 218 209 203 13 234 225 219 14 250 241 235 15 266 257 251 16 282 273 267 17 298 289 283 18 314 305 299 19 330 321 315 Port size One-touch fitting 4-4-33 34 Series SYJ500 Type 41R Manifold: Side Ported (External

VZ100/300/500

Change of electrical entry (Orientation) After separating terminal block and housing, the cord entry direction can be changed by attaching the housing in the desired direction (4 directions in 90 increments). In the case of w/ indicator light, avoid damaging the indicator light with lead wire. Precautions Plug a connector in or out vertically, never at an angle.