Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(= E) 15 15 5H9 (+0.030 0 ) depth 56 150 n x 5.5 60 5 5H9 (+0.030 0 ) depth 56 5H9 (+0.030 0 ) depth 56 6 10 G 25 Motor option: With lock Cable length 250 (146) 65 20 24 15 Lock cable Motor cable *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

PFxx-OMX0002

L/min (PF3A706H) [6000] 6000 L/min (PF3A712H) [F 2] 2 [ 150] 150 L/min (PF3A703H) [H_2 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) [ 600] 600 L/min (PF3A712H) [dt2 ] Delay time setting [0.00] 0.00 s [CoL ] Select display colour [1SoG] Green when ON Red when OFF (OUT1) [F 3] [FiL ] Select digital filter [ 1.0] 1 second Page 44 [F 5] [FUnC] Select FUNC (switching analogue output/external

Magnetically Coupled Rodless Cylinder

, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

70pvpump

SUP = 0.2 MPa 150 100 50 1 0 2 3 4 5 6 7 Caution Cycle (Hz) 1. These flow characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2. The discharge rate differs greatly depending on properties (viscosity, specific gravity) of the fluid being transferred and operating conditions (density, lifting range, transfer distance).

Suction Filter with Case FH99 Series

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N

Table of Contents

Exploded View: VQ1000-Plug Lead Unit (F, P, T, S kit) . 115 115 116 121 122 122 123 126 126 127 130 131 132 136 140 144 148 152 156 160 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 167 168 172 174 176 177 179 184 184 185 186 186 187 188 188 190 194 198 202

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Stability of suction position,

26 11 11 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80UMJB10 105 165 444 442 459 ZP3E-YF80UMJB30 130 190 475 473 490 ZP3E-YF80UMJB50 150 210 500 498 515 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF100UMJB10 107.5 167.5 482 478 508 ZP3E-YF100UMJB30 132.5 192.5 513 509 539 ZP3E-YF100UMJB50 152.5 212.5 538 534 564 *1) Center of the rotating angle 464 A

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

New

Compact Lightweight Height Weight MPa 4%Smaller 27%Lighter (150 g) (4 mm) 0.02 (VXZ23, Resin body) (VXZ24, C37 (Brass) body) Pilot operated/VXD Zero differential pressure type pilot operated/VXZ Comparison with SMC conventional model 0 VXZ23 Conventional model VXZ New 4 mm 4 mm Air Air Body material VXZ23 Aluminum, Resin (Built-in One-touch fittings) (Conventional model) 93 mm 93 mm (New

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

CXS20-70-XB19 70 164 140 CXS20-75-XB19 75 169 145 60 CXS20-80-XB19 80 174 150 CXS20-90-XB19 90 184 160 CXS20-100-XB19 100 194 170 6 Series CXS-XB19 Dimensions CXS25--XB19 30 ZZ S 14 10 SS 28 1 2-5 x 22l AW (spring pin) 30 Z 20 7 2-6.9 through 2-11 counter bore depth 6.3 78 1 75 0.2 60 0.2 60 0.2 35 80 6.3 64 3.1 5 M6 x 1 x 18.5l and M6 x 1 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through)

New

290 1/8 3.2 1.08 0.52 0.35 8.4 0.35 85 0.6 3/32 2.4 0.68 0.52 0.21 5.0 0.21 430 3.0 430 1/8 3.2 1.12 0.51 0.35 8.4 0.35 180 1.2 2 VXN22 1/8, 1/4, 3/8 430 460 5/32 4 1.56 0.50 0.52 12.5 0.52 140 1.0 7/32 5.6 2.29 0.55 0.73 17.5 0.73 50 0.35 1/8 3.2 1.19 0.47 0.35 8.4 0.35 430 3.0 560 3 VXN32 1/8, 1/4, 3/8 570 590 5/32 4 1.56 0.50 0.52 12.5 0.52 300 2.1 7/32 5.6 3.14 0.47 0.88 21.1 0.88 130

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction