Floating Joint

M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 40 63 80 100 140 160 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Additionally, when screwing the stud and socket or the case into a driven body, screw in such parts with the dust cover removed.

LEC-OM071xx

This product supports level 03H. 00H: 31.25, 62.5, 125, 250, 500 (sec), 2 to 64 (msec) (2 msec increment) 01H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (1 msec increment) 02H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (0.5 msec increment) 03H: 31.25, 62.5, 125, 250, 500, 750 (sec), 1 to 64 (msec) (0.5 msec increment) 18H Binary Data Minimum Value of Communication Cycle 4 bytes

Electric Actuator Triple Axis P&P Unit

s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

JA/JAH/JB/JS

x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Air Slide Table Series MXP

mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 196 Air

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

MXS

0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static yaw moment applied at arrow for fully extended

MXQ

140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 +

Process Valve Series VNA

135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5 283.5 256.5 272 296 299.5 (296.5) 315 (312) 339 (336) 304 319.5 343.5 310.5 326 350 32 40 50 Note) ( ): CE compliant product (-Q) 371 Series VNB Specific Product Precautions Be sure to read before handling.

Air Slide Table Series MXS

0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the table displacement when the static moment load is applied to the table.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Support Guide/11-LEFG Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

SI unit for AS-Interface

mA or less 5 240 mA or less 6 120 mA or less 6 Number of outputs 8 outputs 4 outputs 8 outputs 4 outputs Output type PNP (negative common) / source Load Solenoid valve with surge voltage suppressor of 24 VDC and 1.5 W or less (manufactured by SMC) Output specification Supply current 24 VDC Residual voltage 0.3 V or less Supply current 500 mA or less 7 250 mA or less 7 240 mA or less 6 120

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa Supply pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) 0.4 Set pressure (MPa) Set pressure (MPa) 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 Courtesy of Steven

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 500 1000 Not available with air cushion. Other strokes available on request.

Air Slide Table Series MXQ

140 180 200 25 5 6 13 + 0.2S 10 23 23 30 140 170 210 250 315 385 35 10 10 40 26 + 0.2S 23 30 35 47 335 340 380 450 490 745 655 70 23 25 100 43 + 0.2S 40 53 60 75 605 610 670 735 835 1250 1400 1000 105 40 45 160 55 + 0.2S 65 120 115 170 1100 1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

50 Silicon rubber 30 to 200 60 Urethane rubber 0 to 60 60 Fluoro rubber 0 to 250 50 EPR 20 to 150 The above table covers only general characteristics of subject rubber materials.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10