Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

5 Port Solenoid Valve

Page 14 D-sub Connector F kit Page 18 Flat Ribbon Cable P kit P kit EX180 Page 22 PC Wiring System Compatible Flat Ribbon Cable J kit J kit Page 26 Manifold Optional Parts Page 28 Construction Page 29 Manifold Exploded View S kit Page 32 Plug-in Manifold Stacking Base EX260 Page 32 Serial Transmission S kit EX250 Page 44 D-sub Connector F kit EX600 Page 48 Flat Ribbon Cable P kit F kit EX500

REC

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-A02 Bore size Series MB Pressure

LEC-OM02904

) (100) L .

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

Sensor Monitor

0 Units selection function 27 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F80 Power saving mode 46 F81 Security code 47 F82 Input of line name 49 F90 Setting of all functions 50 F98 Output check 52 F99 Reset to default settings 54

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

51

Refer to page 372 for pivoting bracket. (80, 100) Clevis: CG3DN Bore size Stroke With rubber bumper H S + Stroke L RR V CZ TZ GA GB 8 x J F 2 x P AL A Width across flats NA CDH10 (Hole dia.) C d9 (Shaft dia.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Fieldbus system EtherNet/IP compatible SI Unit

0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Cylinder with Lock Series MNB

177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101