240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Series SV

One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] L3 (L4) U side D side L5 47.3 4-6.2 (for mounting) (5.4) [for Rc 1/4, 3/8] DIN rail holding screw (for DIN rail mounting) 13.3 81.7 75 B B B B B 8 164.7 148.2 5.5 35 A A A A A 98.2 A B A B 1 2 3 4 5 6 7 8 9 10 11 12 13 14

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

IZx-OMT0049

When the controller and high voltage power supply module are directly connected Install the directly connected controller and high voltage power supply module at location B using M4 screws. Refer to 6. Dimensions for details. B : M4screw B : M4screw B : M4screw B : M4screw When IZTC41(-L) and IZTP42(-L) are When IZTC41(-L) and IZTP41(-L) are directly connected. directly connected. .

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

MY1

Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5 M6 x 1

MY1

MTS Side support B MY-SB MY CY 2-J MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10

Compact Cylinder

B (Mounting groove no.) C (Mounting groove no.)

Rotary Cylinder Series MRQ Size: 32, 40 1

Find the moment of inertia IB for the rotation of shaft (B). 2. Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a + b 2 2 A = ( ) b a 2 B = m 12 No. of teeth = b 11-10-3 4 Technical Data 3: Theoretical Output 5.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.

MX-OMP0051

NPN PNP PLC PLC PLC PLC AND(),OR() NPN AND () NPN AND () NPN OR 2 ON , 2 AND 2 OR 2 AND ON 2 ON , 2 OR OFF ON ,= *2 = 24V 4V *2 = 16V :24V,4V OFF ,= *2 * = 1mA *2 *3K = 6V :3K,1mA 3 3-1 ,,, ,,, 3-2 18 3-3 1 2 3 4 5 6 7 8 MXQ6(B),8(B,C),12(B,C) 9 Assy MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A) 10 (MXQ6(B)) (MXQ8(A,B,C),12(A,B,C)) (MXQ8(A,B,C),12(A,B,C)) 11 (MXQ16(

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

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PE 12 E Bracket Main port R J D 1 2 3 I O M C N H B P: For mounting 4 locations G A Air Operated Type A B C D E F G H I J K L M N O Model SGHA130-10 SGHA230-3015 SGHA230-7015 SGHA330-3020 SGHA330-7020 SGHA430-3025 SGHA430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150

Rotary Table/Rack & Pinion Style Series MSQ

bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 278 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ o i t !