Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (N) Lateral load F (N) 50 CX 0.2 MPa 20 Point of application L 0.3 MPa 40 CY 0.2 MPa 30 Lateral

LEC-OM069xx

ms to 32.00 ms (in 3.00-ms units) 30 30 3.50 ms 3.50 ms to 32.00 ms (in 3.50-ms units) 30 30 4.00 ms 4.00 ms to 32.00 ms (in 4.00-ms units) 30 30 Note: Communications retry stations can be connected as long as the total number of connected stations, including the retry stations, is within the connectable max. number of stations.

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

Modular Type Air Filter Series AF

AF30 AF40 AF20 AF40-06 AF50 AF60 1/4 3/8 1/2 1/4 3/8 1/2 3/4 1/4 1/4 1/8 3/4 Port sizes Port sizes 3/4 1 3/4 1 1 3/8 3/8 1/4 1 How to Order How to Order 03 30 R X430 B AF F 2 03 30 R X425 B AF F 2 Air filter Air filter For high/low temperature For high pressure Body size X430 X440 Low temperature Body size Optional specifications High temperature 20 30 40 50 60 30 40 50 60 Description Applicable

Digital Flow Switch (Integrated display type)

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

Floating Joint

42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5

Series VS

Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B 7. Detent assembly SF4-mF-30 SF4-mF-30 8.

Sine Cylinder Series REC

Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7

Sine Cylinder Series REC

Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7

Sine Cylinder Series REC

Stroke (cm) Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7

Thermo-con

flow rate: 1.3 gpm (5 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) Circulating fluid: 20% ethylene glycol HEC003 Circulating fluid: Clear water 50 70 90 110 130 150 F 50 70 90 110 130 150 F 1000 1000 800 800 Cooling capacity (W) Cooling capacity (W) Facility water: 68F (20C) Facility water: 50F (10C) 600 600

High-precision Digital Pressure Switch

0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all

5 Port Solenoid Valve

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

CNS

Graph (1) 30 20 10 2.

VCL

A B C D E F G H J L Port size Valve model VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting

MHK2

Internal Grip External Grip MHKL2-12S MHKL2-12C 20 15 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 15 Pressure 0.6 MPa MHZ 10 0.5 MPa 0.5 MPa 10 MHF 0.4 MPa 0.4 MPa 5 5 MHL 0.3 MPa 0.3 MPa F F 0 0 MHR 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHKL2-12S MHKL2-12C 20 15 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 15 Pressure 0.6 MPa MHZ 10 0.5 MPa 0.5 MPa 10 MHF 0.4 MPa 0.4 MPa 5 5 MHL 0.3 MPa 0.3 MPa F F 0 0 MHR 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Cylinder with Lock Series CNS

C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 15 31 25 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 15 31 30 to 1000

C95

from 0.5MPa Graph 4 Load in direction of rod extension Load in direction of rod retraction m from 0.3MPa Graph 5 F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 1.11-30 Series C95N Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m [kg] Load weight: m [kg] CJ1 63 50 40 30 50 40 30 32