Stability of suction position,

Width across flats 14 31 17 A Width across flats 14 17 31 A A 15 25.5 8 B 3 14.5 25 8 14.5 25 8 B 2 B 2.5 35 32 43 40 53 50 Dimensions Dimensions Dimensions Model A B ZP3E-T32UMl-B8 M8 x 1.25 9.5 ZP3E-T32UMl-B10 M10 x 1.5 13 Model A B ZP3E-T40UMl-B8 M8 x 1.25 9.5 ZP3E-T40UMl-B10 M10 x 1.5 13 Model A B ZP3E-T50UMl-B8 M8 x 1.25 9.5 ZP3E-T50UMl-B10 M10 x 1.5 13 Model Weight [g]/Pad material

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

4/5 Port Solenoid Valve

(DIN 16.6) 16.5 11.5 0.5 122 [126.4] 107.4 [111.8] 62.3 (DIN 63.6) R P R 61.5 (DIN 62.8) A A A A A 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 21 60 B B B B B 1/4 (P, R port) (Pitch) P = 19 Manual override 23.5 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + + 58 [65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN terminal

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

MY1

-www.stevenengineering.com 63 50 40 32 25 Mounting position CX A 184.5 278.5 323.5 229.5 139.5 B 95.5 121.5 136.5 110.5 80.5 DOperating range l Note) 5 5.5 5.5 5 5 B A -X 20MY1C (Cam follower guide type) Data (mm) 63 50 40 32 25 Mounting position A 157.5 278.5 127.5 323.5 97.5 B 182.5 121.5 152.5 136.5 122.5 Operating range l Note) 5 5.5 5 5.5 5 B A MY1H (High precision guide type) (mm) 40

High Vacuum Angle Valve

Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B B B B 75.5 (P, EA, EB port) 1/8 15 (Pilot EXH port) M5 x 0.8 (Pitch) 18.5 P=12.5 L2 L1 4 With plug (6) 125.9 (28.5) (Station 1) (Station n) 112.4 (For mounting) 4 x 4.5 EA X PE (Light/surge voltage suppressor) A A A 55.8 24.6 16 P B B B EB -+ -+ 61 [68] 45.6 A A 7.4 32 22.2 32 B B (Pitch) 40 7 (Pitch) A, B port 1/8 P=12.5 18.5 76 [83]

LJ1H

B 89 A A B Section BB Coupling P.C.D.

Air Cylinder

CG1GN E 0 0.05 FX0.15 B ZZ + Stroke H FT F B FX0.15 (mm) (mm) Rod Flange Bore size ZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st 20 131 156 181 25 136 161 186 211 32 138 163 188 213 40 155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss

JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Magnetically Coupled Rodless Cylinder

B 4 x Counterbore depth.

Table of Contents

4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust center Closed center 1 150 or less

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

Rotary Actuator

Size 40 L L 2 K G1 0 0.030 F D B 4 K N V1 Body (B) T V2 M S Body (A) h Key dimensions L1 b C G2 J F h (h9) L1 b (h9) Model L 2 x R A CRB2B;40 4 0 0.030 4 0 20 E 0.030 CRB2B=10-=S CRB2B==-=SE/DE A port B port N W 2 x R 2 x M3 x 0.5 (Depth 4) Size 10 only (for mounting unit) Y X (mm) Q Model A B C D G1 G2 J K L M N P &Q1 E(g7) F(h9)

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Brown Black Red Black Orange Black Y ellow Black Vcc GND A A B B Z Z Connector B terminal no.

NCG/CG1

ZZ + Stroke Rod Side Flange Style M M Stroke range (mm) Bore size (mm) B E F FX FD FT H B 20 25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 35 40 40 50 58 58 71 71 LT LH LT LX X Y Y X LZ LS + Stroke

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

24

A *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW For D-P3DWA (*: Cannot be mounted on bore size 20.) 25 to 63 80, 100 Bore size A B A B A B A B A B 20 40 7 36 3 35 2 25 40.5 7 36.5 3 35.5 2 36 2.5 32 37.5 10 33.5 6 32.5 5 33 5.5 32 4.5 40 43.5 10.5 39.5 6.5 38.5 5.5 39 6 38 5 50 44.5 9.5 40.5 5.5 39.5 4.5 40 5 39 4 63 47 12 43 8 42 7 42.5 7.5 41.5 6.5 80 68 23.5 64 19.5 63 18.5 63.5 19 62.5 18

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235