Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

HRX-OM-W002

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

Note 4) AS231FE-01 (4, 6) is POM. 15-9-38 4 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type Model Weight (g) T H1 H2 D1 D2 L1 L2 L3 L4 A M1 Max. Min. Max. Min.

CLA

Cylmoer IS unlocked allln"le of shipment See page 9 lor notes and Instruc~ons 01 engagHlg lOCk unit.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Nozzle Type Ionizer

L-bracket IZN10-B1 Pivoting bracket IZN10-B2 Power supply cable length Symbol Type 01 1 m 20 20 m * Available in 1 m increments from 1 m to 20 m.

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

•

W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS2200-01-X12 Ex.) AS2200-01-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) X214 Ex.)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

KRM

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

KK/KK13

Orange Calculation of Connected Plug and Socket Dimension Overall length of connected plug and socket B = Plug (L1 L2) + Socket (L2) + 0.5 Plug Socket Example) Overall length of KK3P-01MS (plug) and KK3S-01MS (socket) when they are connected.

S Couplers Series KK/KK13

Orange Calculation of Connected Plug and Socket Dimension Overall length of connected plug and socket B = Plug (L1 L2) + Socket (L2) + 0.5 Plug Socket Example) Overall length of KK3P-01MS (plug) and KK3S-01MS (socket) when they are connected.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

Compact

Power Connector Molex lnc. part numbr 39-01-2180 (receptacle), 39-00-0039 (pins).