Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60 C, VALVE DBL PLUGIN BASE MOUNT, VALVE, VFS5000 SOL VALVE 4/5 PORT, 2Q, VFS5000, 2.97624 lb

Please contact us for the latest version.sales@ocaire.com, VALVE DBL NON PLUG-IN BASE MT, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 1.32277 lb

Please contact us for the latest version.sales@ocaire.com, VFR4000, VALVE, VFR4000 SOL VALVE 4/5 PORT, 2Q, VFR4000, 1.82854 lb

Please contact us for the latest version.sales@ocaire.com, VALVE DBL NON PLUG-IN BASE MT, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 1.87086 lb

VFS3000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/4, 3/8, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 0.902 lb

VFS3000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/4, 3/8, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 0.902 lb

Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60C, VALVE DBL PLUGIN BASE MOUNT, VALVE, VFS5000 SOL VALVE 4/5 PORT, 2Q, VFS5000, 2.62193 lb

Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60 C, VALVE DBL PLUGIN BASE MOUNT, VALVE, VFS5000 SOL VALVE 4/5 PORT, 2Q, VFS5000, 2.81089 lb

Cylinder

~imension W , :1 . ' ' ,~:~\ '-tg" size ( mm) ~ I~ I~ 20(,1) 1 3)(stlI5(Sl) lQ I~ 2O(,t) 1 3)(SI) 5, 10, 15, 2OlSiili;:~ 5",1 Q, IS; 2Q\si) [:n(SI) I 0 <

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

7

VX3 Conduit (With surge voltage suppressor) VXA Flat terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Made to Order Produced upon receipt of order. Please contact SMC for lead times.

3

Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L 220 VAC 1M 240 VAC 1W 24 VAC 1P 48 VAC Conduit With surge voltage suppressor VXH VXF 1Q 220 VAC 1R 240 VAC 1Y 24 VAC VX3 VXA 2A 24 VDC 2B 100 VAC 2C 110 VAC 2D 200 VAC 2E 230 VAC 2F 48 VAC 2G 220 VAC 2H 240 VAC 2V 24 VAC 2L 100 VAC DIN terminal With surge voltage suppressor With light 2M 110 VAC 2N 200 VAC 2P 230 VAC 2Q

Manifold Specifications

Note C4: A, B port with One-touch fitting for 4 C6: A, B port with One-touch fitting for 6 SUP/EXH block assembly Description Manifold block assembly D side C4 C6 VZ3000-50A-2q P/R port with One-touch fitting for 8 For D side For U side VZ3000-51A-2 VZ3000-52A-2D w e End block assembly End block assembly DIN rail VZ3000-52A-2U r How to Increase Manifold Base Station expansion is possible

Manifold Specifications

Note Description C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 Manifold block assembly C6 C8 VZ5000-50A-2q SUP/EXH block assembly P/R port with One-touch fitting for 10 For D side For U side VZ5000-51A-2 VZ5000-52A-2D w DIN rail End block assembly End block assembly e VZ5000-52A-2U r How to Increase Manifold Base Station expansion is possible at any

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !

Table of Contents

2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !

PFxx-OMJ0005CN

)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -31No.PF-OMJ0005CN-I [F 7] "0" [---] 0 30ms GND <> [F 7] [inP] [F 7] [F 1][F 2] -32No.PF-OMJ0005CN-I <> PFM710n_11.6H_10.4() ON/OFFONn_1 OFF(n

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

PFxx-OMP0001CN

-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000

PFxx-OMS0001CN

-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A