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-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5

-020 BMA2-025 BMA2-032 BMA2-040 9 8 10 10 9 8 10 10 14 13 13 14 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F D-G5NTL D-G5NBL 9 8 10 10 4.5 4 4 5 BA-01 BA-02 BA-32 BA-04 D-H7C 9 7 8.5 10 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4.5 4 4 5 D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C D-G59F D-G5NBL BM1-01 BM1-02 BM1-32 BM1-04 5.5 5 5 6 40 40 35 45 Since this is a guideline including hysteresis, not

50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x 1.25 Model A B C D F NL P F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53 712 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT Series How to Order ZPT 10 F GN J 20 04 A10 Mounting

13.5 19.5 40 6 ZPT50F-B01 Rc(PT)1/8 6.2 14 4 Vertical Vacuum Entry Series ZPT With Buffer How to Order ZPT 10 F GN J 20 04 A10 Mounting thread diameter/male thread (Refer to Table 1 for applications.)

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Type 40/Type 41 How to Order SS3YJ7 40 05 01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 A A F N T A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 A port 1/8 Note) If there are more than

volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41 40 + Stroke 45 Bore size [mm] Weight Reduction rate % CDQ2 JCDQ Weight Volume 40 290 g 201 g 31% 35% 50 455 g 332 g 27% 28% 63 627

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.

Regenerative power [W] Built-in regenerative Driver LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSB-S5 30 LECSB-S7 10 30 100 LECSB-S8 10 30 100 Note 1. Always install a cooling fan. 2.

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering