HRX-OM-X071 HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !
ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1
How to Order Specifications 11 MSQ 1 M9BW B A E S Particle generation grade Grade 1 Note 1) Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Number of auto switches Clean Series Vacuum type Auto switch Note) Please refer to Pneumatic Clean Series catalog for further details.
Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)
CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly
) 02 2 stations N SD Note 2) SU Note 2) 11 11 stations W Note 1) Add 1 station for terminal block box mounting.
0.45 thread 3.5 deep 4 0.5 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 12 32 18 24 9.5 F 3H9 2.5 deep +0.025 0 10 N -1 X F 2-M3 X 0.5 thread 5 deep 2 11 3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) X H G H 11 5.5 5.5 11 A B 6.5 3.2 7 7 12 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Cross section BB Cross section
65.5 36.5 31.2 17 X 62 5 1 P 3 R1 R2 R1 R2 5 1 P 3 26 (33) 15.2 13.8 8 PE port 4-Rc 1/4 3(R2), 5(R1) port 2-M5 x 0.8 External pilot port 37.4 66.5 11 20 16 20 2-Rc 1/4 1(P) port 20 20 The broken lines indicate the DIN rail mounting style [-D]. (38) 67 11 External pilot specifications L plug connector (L) DIN terminal (Y) 149.5 (3 position) 300 136.5 (Double) 155.5 (3 position) Max. 10
69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5
R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20
thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc
16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20
MB1 CA2 CS1 CS2 a (1) BJ-1 is a set of a and b. BJ4-1 (Switch bracket: White) BJ5-1 (Switch bracket: Transparent) (2) BMA2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).
1, !2 e (1 pc.) @0 10-11-11 11 Series MIW/MIS Dimensions: Double Finger Type MIW-D 2-P Supply port 3-LA Scraper mounting thread EB FB NB ME PE GD LB JA B FA FC GC GB JB Mounting hole 4-GA LC C EA D 2-P Attachment mounting thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller
K Bore size (mm) Without rod boot With rod boot ZZ 197.6 207.6 213.6 241.6 249.6 S MM N W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke e 43 52 52 65 65 f 11.2 11.2 11.2 12.5 14 h 59 66 66 80 81 ZZ 205.6 215.6 221.6 250.6 258.6 H 51 58 58 71 72 40 50 63 80 100 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 130.6 133.6 140.6 152.6 159.6 6 7 7 11 11 27 30 31 37 40 8 8 8 0 0 10
Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.
VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2