176 176 250 268 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195
Example 1) For 90 degrees (1) Set the adjustment bolt B while supplying (2) Set the adjustment bolt A while supplying pressure from the A port. pressure from the B port.
Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 (mm) Bracket mounting size Accessory specifications With auto-drain Standard specifications Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14 18 20 24 24 B 67 97 129 165 169
B-B B Component Parts Component Parts (Right/Left side parallel only) No.
MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566
) VFM250-02-34R/B/G/Y Panel mounting hole 39 ON M5 x 0.8 (Pilot exhaust port) T.T. 40 38 24.5 Max. 6 OFF 1.5 1.5 28 Symbol 3 18.5 (B) 2 (A) 4 PE EA P EB 14 12 (161.2) 3 (EB) 1 (P) 5 (EA) (133.2) 20.4 32.2 20.4 32.2 114.7 22 20.4 20.4 A B 42.4 0.5 MPa supply 40 28 3 x 4.5 mounting hole 2 5 x Rc 1 4 23 4 5.5 T.T. 23 N F.O.F. 90 Key selector (2 position) VFM250-02-36 ON Panel mounting hole
(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.
(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65
18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) A A A A A HS A HS HS B 15 (22.5) 15
X 1.5 47 50 65 31 15 145 115 M14 X 1.5 17 59 35 16 90 14 36 43 29 32 25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube
B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
AL40-06 AL50 AL60 25 40 53 70 75 90 95 Optional specifications With drain cock B 85 123 153 187 187 261 279 Metal bowl B 82 121 142 176 176 250 268 Drain cock with barb fitting B 161 195 195 269 287 Model Metal bowl with level gauge Metal bowl with drain cock & level gauge B 162 196 196 270 288 Metal bowl with drain cock B 85 124 166 200 200 274 292 S 38 45 45 S 38 45 45 B
(mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1400 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA LD LH LS LT LX LY MM N P Q R S T V VA X Y
Note 3) For piping, refer to Specific Product Precautions. 882 Hygienic Design Cylinder Series HY Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height HYB D-H7BA 16 16 SMC SMC SMC SMC Hs B 29 A B Hs 29 A 20, 25 32 to 63 D-G5BA 24.5 A 33 B Hs 80, 100 (mm) D-H7BA D-G5BA A Bore size B Hs A B Hs 20 25 32 40 50 63 80 100 29 29 30 34.5 42 42 19.5 19.5 20.5 22.5