Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

MB

, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

SX

100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

240

kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Manual override operation Solenoid valve for 200/220 VAC specifications Warning Warning Solenoid valves with grommet and L/M type plug connector AC specificatinos have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200/220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

Bearing Style: A (High Precision Type), Size: 10 mm, Shock Absorber: L (For Low Energy), Port Location: 2 (Standard 180°), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Precision: B (Basic), Size: 200, Suffix: R (Shock Absorbers), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Bearing Style: A (High Precision Type), Size: 50 mm, Shock Absorber: L (For Low Energy), Port Location: 2 (Standard 180°), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Precision: B (Basic), Size: 100, Suffix: R (Shock Absorbers), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Type: A (High Precision Type), Size: 7, Port Location: Side Port, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Type: B (Basic Type), Size: 7, Port Location: E (Front Port), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Type: B (Basic Type), Size: 7, Port Location: Side Port, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Precision: B (Basic), Size: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Model: MSQ, Type: B (Basic Type), Size: 3, Port Location: Side Port, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)