Compact Type

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Digital Flow Switches, Series PF2A, Series PF2W

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

IDU/IDF

595 B IDF8D-1 69 55 14 G D 65 (F) C 462 490 E 4-13 H 645 IDF11C-1 Base integrated with transformer 462 490 695 427 557 IDF15C-1 IDF-TB2 53 438 466 IDU4D-1 681 Transformer IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Part No.

CLS

1 !2 !3 !4 !5 !

Series AP500

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

DOC1003626

returned when the following request message is received. 1) When unspecified function code is used. 2) An address out of range is specified. 3) The data field is not normal.

CNG

Brake spring Taper ring Ball retainer Brake shoe holder Air pressure supply Air pressure exhaust Brake shoe Release piston Steel ball Locked state Unlocked state 9-5-10 11 Series CNG Cylinder with Lock Double Acting, Single Rod Construction #7 e$4!2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!

Shock Absorbers and Rate Controls

I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Speed Controller with One-touch Fitting

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

IDX-OM-Y002

Fig. 1 shows the possible issues due to water quality 9 Trouble due to scale is likely to occur 8 pH (25oC) Within criteria 7 Trouble due to corrosion is likely to occur 6 5 4 102 2 3 4 5 103 2 3 4 5 104 102 102102102 102 102102102 Electric conductivityS/cm Fig. 1 Relation between pH conductivity and trouble (3) Maintenance and inspection of the strainer (monthly) CAUTION If the mesh of the

Prevents Micro-Bubbles

Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment

E-P HYREG

Port 2 (A) pressure (MPa) Port 2 (A) pressure (MPa) 0.8 0.8 0.8 0.7 0.7 0.7 0.6 0.6 0.6 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 VY1D00-5 VY1B0-5 VY120-5 1 0 1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2

MLGP

80 100 Operating range Operating range l (mm) 5 5 6 6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

MLGP

80 100 Operating range Operating range l (mm) 5 5 6 6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

Title not found

4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked

Compact Cylinder Series NCQ8

7/8 4 4-1/2 5 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 0.33 0.18 0.39 0.21 0.27 0.45 7 Series NCQ8 Construction Without auto switch Here is the typical, cross-sectional construction