7.4

assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5 175 187.5 187.5 200 212.5 225

Compact

165 Minimum Stroke for Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175 20 195 211 225

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 Station 2 58 49 43 3 74 65 59 Station 20 346 337 331 4 90 81 75 5 106 97 91 6 122 113 107 7 138 129 123 8 154 145 139 9 170 161 155 10 186 177 171 11 202 193 187 12 218 209 203 13 234 225 219 14 250 241 235 15 266 257 251 16 282 273 267 17 298 289 283 18 314 305 299 19 330 321 315 Port size One-touch fitting 4-4-33 Series SYJ500 Type 41R Manifold: Side Ported (External

4/5 Port Air Operated Valve Series SYJA3000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

VZ3000

M5 x 0.8 (PE port) MAX. 5.5 (One-touch fitting) VK VZ VF (Pitch) VFR (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/4 VP4 VZS G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0604 (Pitch) (mm) Stations 2 3 65 52 81 68 20 353 340 L1 L2 4 97 84 5 113 100 6 129 116 7 145 132 8 161 148 9 177 164 10 193 180 11 209 196 12 225

VQ20/30

19 20 L1 L2 L3 L4 L5 759 749 775 785.5 747.8 722 712 737.5 748 710.8 685 675 700 710.5 673.8 648 638 662.5 673 636.8 611 601 625 635.5 599.8 574 564 587.5 598 562.8 537 527 562.5 573 525.8 500 490 525 535.5 488.8 463 453 487.5 498 451.8 426 416 450 460.5 414.8 389 379 412.5 423 377.8 352 342 375 385.5 340.8 315 305 337.5 348 303.8 278 268 300 310.5 266.8 241 231 261.5 273 229.8 204 194 225

3 Port Solenoid Valve Series VQ100

stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225

LX

1 1 50 50 4.2 2.1 2.1 4.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 2.1 1.1 1.1 2.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 1.1 0.6 0.6 1.1 0.3 0.3 0.1 0.1 0.1 0.1 For transfer load of 1.5kg Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 50 4.1 2.1 1.1 0.3 0.1 Speed (mm/s) 100 2.1 1.1 0.6 0.2 0.1 200 1.1 0.6 0.3 0.1 0.1 Refer to page 302 for acceleration time. 225

Silencer Series AN

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

3 Port Solenoid Valve Series VQ100 1

stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225

Soft start up valve with lock out

No gauge Nil 24VDC 5 AC20* 41.5 43 67.5 Pressure gauge (Unit: MPa) G 12VDC 6 AC25* 55 57 78 Pressure gauge (Unit: MPa, psi) P Others 9 AC30* 55 57 78 Specifications AC40* 72.5 75 100.5 Piston B Switching Pressure (Close to Open) AC50* 93 96 131 Model AV4000 AV3000 AV5000 AV2000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101 131 Proof pressure 225

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to page 225 for applicable auto switches in addition to those listed above. For details on auto switches with a pre-wired connector, refer to pages 1784 and 1785.

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

IP65 Operating: 0 to 50C, Stored: 25 to 85C in stock (with no condensation and freezing) Operating temperature range Voltage resistance 1000 VAC for 1 min. between external terminals and case Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between external terminals and case Standards CE, RoHS Lead wire Cabtire cord, 4 cores 3.5, 3 m Weight 140 g (without lead wire) 225

Part Number Description: BLANK STA.KIT-MZ311   Product Line: V   Product Line Description: VALVE   Family Code: 225   Family Description: VZ300 SOL VALVE 3-PORT   Class Code: 22   Part Code: 2   Reference Code:  K   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: GASKET NVZ300   Product Line: V   Product Line Description: VALVE   Family Code: 225   Family Description: VZ300 SOL VALVE 3-PORT   Class Code: 21   Part Code: 2   Reference Code:  K   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

100kPa to 0.7MPa (external pilot, pilot pressure range) 0.25 - 0.7MPa , Effective area mm 2 (Cv): body ported 10.6 (0.59); base mounted 12.6 (0.7) , Coil rated voltage: 3, 5, 6, 12, 24VDC; 100, 110, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 225

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, CYLINDER, SLIDE TABLE, GUIDED CYLINDER, D81, 225 lb

structure limits the contact of moist air with the sensor, reducing degradation of the sensor and helps maintain accuracy.  2-color display improves visibility , Helps promote energy savings , Response time can be set based on application , Integrated flow adjustment valve , Compact and space saving , Expanded flow range, 2-COLOR DISPLAY DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 225

Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1, or 2s can be chosen., Easy connection and removal of wiring., REMOTE DIGITAL FLOW METER, DIGITAL FLOW SWITCH, F27, 225

Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1, or 2s can be chosen., Easy connection and removal of wiring., REMOTE DIGITAL FLOW METER, DIGITAL FLOW SWITCH, F27, 225