Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

HRL

Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB Lots of variations are available according to the users requirements.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

48

D-M9l, D-M9lV (With indicator light) D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Auto switch model Electrical entry In-line Perpendicular In-line Perpendicular In-line Perpendicular Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

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r 2 r -'w'"''' '"''-' ' '-'''-'..J Width 8Cf05S f lats 6 4)(0. i Width across 11.111 ' 9 , o I i. , , . Flat with rib Flat with rib Deep type/ ZPY25D only I~ Deep type/ ZPY40D only p M14X, . Wldlh across flatl 19 r Wtdth across flats 7 m o D U ~' -4= M5XO.8 ..

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Note 7) In case of an external pilot "R", indicate external pilot specification "R" for the applicable valve also. B3 Stations B4 D side B6 B5 LM Note) Stations are counted starting from station 1 on the D side. Note 1) Indicate CM and LM in the specification table. Note 2) Inch sizes use the following symbols.

3 Position Cylinder Series RZQ

D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL D-F7F D-F7NTL Stroke range Only available for full strokes of 5 to 295 mm Part number: RZQA50-135-50 D-A7, A80 Example A 15 mm spacer is installed in a standard cylinder D-A73C, A80C RZQA50-150-50. The B dimension is 246.5 mm.

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Mechanically Jointed Rodless Cylinder Series MY2

Applicable cylinder Port variation MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 1118

ZP

D. Applicable tube O. D.

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

ZP

D. Applicable tube O. D.

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)

Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 125mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking)

Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 200mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking)

Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking)

Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 75mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking)