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Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

9@0 Seal kit MHY10-PS MHY16-PS MHY20-PS MHY25-PS <16, 20, 25> !7!8!9@0 MHY2-D MHY2-D2 MHY-A1001 MHY-A1601 MHY-A2001 MHY-A2501 Finger assembly ro MHY-A1001-2 MHY-A1601-2 MHY-A2001-2 MHY-A2501-2 <10, 16> e!2 Joint assembly MHY-A1002 MHY-A1602 MHY-A2002 MHY-A2502 <20, 25> e!2!

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19 Series SYJ500 Base Mounted (With Sub-plate) [ ] for AC Grommet

HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

SZ3000

Stations are counted starting with station 1 on D side. 60P Flat cable type (26 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 26 26 26 Pos. pin Pos. pin (common) 25 25 25 SOL.B 24 24 Neg. pin (common) Neg. pin Station 12 24 23 23 SOL.A 23 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor

VZS

(n) 7 stations (15 stations) New D-sub connector VQ7 Conventional D-sub connector (2) (1) Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White 8 stations (Max. 16 stations) Terminal No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Dot marking None None None None

LJ1H

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

MHY2/MHW2

Work weight: 0.05kg Example 25 Pressure 0.6MPa 20 0.5 0.4 Holding force (N) 15 13 0.3 10 0.2 5 0.1 Ex.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Stations are counted starting with station 1 on the D side. 60P Flat cable type (26 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 26 26 26 Pos. pin Pos. pin (common) 25 25 25 SOL.B 24 24 Neg. pin (common) Neg. pin Station 12 24 23 23 SOL.A 23 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

•

(Example) CS2L160-500 28 to 30 160 I 3/4 BaSIC weight . 12.45 (kg) Additional weight .. .. 2 23 (kg!1 00 mm) Cylmder stroke .. 500 (mm) 3.

Digital Flow Switches, Series PF2A, Series PF2W

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

Digital Flow Switches

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

XL

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3

High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3

Possible to transfer a workpiece at low-speed.

Note 10 Description 15 20 30 40 Seal kit P473050-23 A set of above numbers o, !9, @0, @1 and @2 P473010-23 P473020-23 P473030-23 P473040-23 Parts included in Seal Kit DNo. Description Qty. Note 9 4 Wear ring 19 1 Seal 2 Gasket for cover Size: 10, 15 20 1 Gasket for end cover 4 Size: 20, 30, 40 Gasket 21 4 Piston seal 22 2 Seal washer A set includes all parts above.

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

PSxx-OMV0008CN

UPDOWN[F 2] SET UP DOWN OFF SET UP DOWN [OFF]OFF SET SET 23 [Err] SET [P_2] [P2L][P2H] [P_2][n_2]Pn (58) SET -35No.PS-OMV0008CN-E 23 [H_2] [WH2] (58) SET 25 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -36No.PS-OMV0008CN-E [F 3] 0.0030.00 sec.0.01 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190%