Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Modular F.R.L. Unit

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

10

Rated voltage Rated voltage Electrical option Electrical option GDM2A-G-S5 24 VDC 24 VDC 12 VDC 100 VAC 100 VAC 110 VAC 110 VAC 200 VAC 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC 230 VAC 240 VAC 240 VAC 24 VAC 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5 48 VAC 24 VDC GDM2A-L5 GDM2A-L6

Multi-channel Digital Sensor Monitor ( compatible)

(page 77 to 78) Y U16 0x0190 5 R/W (400) dtH2 (OUT2 delay time at ON) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 6 R/W (0) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtL2 (OUT2 delay time at OFF) Y U16 0x0 7 R/W (0) Setting of digital filter. 0x0 ~ 0x0BB8 (0 ~ 3000) 0.01 s increment 0x070B (1803) 0 R/W FiL (Digital

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

MLGC

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

Title not found

LEFS16A-400 q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

AC Servo Motor Driver (CC-Link Type ）

When CMX 2000, N 3076.7 r/min When CMX 2000, N 3276.7CMX r/min When the servo motor is operated at servo motor speed higher than the limit value, the absolute position counter warning (AE3) occurs. 15.7.1 What is automatic operation mode?

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.

Programless Controller Series LECP1

While the test function operates at manual mode, only the output is valid. 40 RoHS Programless Controller Series LECP1 How to Order C 1 LE N 1 P LEFS16A-400 I/O cable length [m] Actuator part number Controller Nil 1 3 5 Without cable 1.5 3 5 (Except cable specifications and actuator options) Example: Enter [LEFS16A-400] for LEFS16A-400BR16N1 Compatible motor P Step motor (Servo/24 VDC) Number

Actuator Position Sensor

400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4

CJ5-S

Without auto switch CG5 L N 25 S R 100 CDG5 L N 25 S 100 G5BAL R With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.

CJ5-S

) FKM seals (Fluoro rubber) R V NBR seals (Nitrile rubber) FKM seals (Fluoro rubber) R V Data Use of stainless steel as the piston rod material will be treated as a special order.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

ITV

The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.