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HNBR/NBR Screws for assembly Steel 12 ZL1 Series How to Order Replacement Parts z How to Order Supply Valve/Release Valve How to Order Lead Wire with Connector Assembly for Supply Valve/Release Valve 1 M Q Z SYJ5 4 5 SY100 30 4 A 6 q w e r t y q w q Type of actuation q Power supply voltage w Lead wire length 1 Normally closed 2 Normally open (Supply valve only) 1 100 VAC 2 200 VAC 3 Other

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= 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Magnetically Coupled Rodless Cylinder

500 300 200 Allowable driving force Fn (N) 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder shaft center Lo (cm) 4 Series CY3B/CY3R Model Selection Method Precautions on Design w Max.

HRX-OM-W002

Heating capacity [W] 600 600 Heating capacity [W] 40 40 32 32 25 25 400 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-12 Heating capacity (HRR012-A/W-20,HRR018-A/W-20) 9.5.3 HRR024-A/W-20,HRR030-A/W-20 Ambient temp. 800 800 or Ambient temp.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

500 300 200 Allowable driving force Fn (N) 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder shaft center Lo (cm) 4 Series CY3B/CY3R Model Selection Method Precautions on Design w Max.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Air Slide Table/Long Stroke Type Series MXY

L3 A3 Load Mass: W Mr Graph (1) Static moment Dynamic moment MXY6 W My MXH W L3 A3 0.6 A2 L2 Rubber stopper screw Mr 0.5 Load mass W kg MXU L1 A1 Metal stopper screw Mp 0.4 W My MXS W 0.3 W 0.2 MXQ Mey Mep 0.1 We We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MXF MXW MXY8 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when

VEX1

(Without indicator light), 4.3 W (With indicator light) 4.8 W (Without indicator light), 5 W (With indicator light) Non-locking push type Option Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Compact manifold regulator ARM5 Series

250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-309 (One-touch

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0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: Head flange: 0.3 433 386 476 F G L, F 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 5 Series CS2 Construction !

Air Cylinder

30o MM W W AL T T A A A MM L H H H 25 Series CA2 Simple Specials These changes are dealt with Simple Specials System.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

L N VQ110VQ110YVQ110 ZQ1-VQ120Model Push-locking type Non-locking push type / Locking type (Tool type) Manual override Non-locking push type / Locking type (Tool type) Rated coil voltage 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC 12, 24 VDC DC 100 VAC 110 VAC 200 VAC 220 VAC 1 W 1 W 0.5 W 0.6 VA (6 mA) 0.65 VA (5.9 mA) 1.2 VA (6 mA) 1.3 VA (5.9 mA) Grommet

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

7 It is used only in the case of w/ cushion type.

Air Slide Table

Front matter 1 Air Slide Table/Reversible Type Series MXQR Fig. (1) Load Weight: W (kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (3) Workpiece Mounting Coefficient: K Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L1 A1 K = 1 L3 A5 L2 A3 End plate mounting Mp Mr W My W W W L3 A6 W L1 A2

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Pilot Solenoid Valve Specification How to Order Pilot Valve SF4 50 X240 5 T Z SF4-lll-50-X240 Pilot solenoid valve specification Conduit terminal, DIN terminal, M12 connector Electrical entry q w e r DC 24 V, Other (Option) Coil rated voltage V q Rated voltage w Electrical entry AC (50/60 Hz) 100 V, 200, Other (Option) 1 2 3 4 5 6 7 9 T D DO 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: VBA VBAT VBA VBAT 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 AP100 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 1017 VBA Series Construction/Replacement Parts VBA10A VBA11A w q r e w t r e u q t VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q w r y q t e VBA22A, 42A