15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

New

DIN terminal 1 + () 2 (+) q There is no polarity. Use compatible heavy duty cords with cable O.D. of 6 to 12 mm.

Modular F.R.L. Units

D Note 6) N.O.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

5 3 3 3 5 5 33 33 33 (mm) NB 5h9 6h9 6h9 NA 8 10 12 K 4 5 6 J 10 12 14 G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 DC 15 18 21 DO 17 20 24 B 30 36 42 R 25 29 34 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Q 6 7 8 Model MHS3-16D MHS3-20D MHS3-25D 0 -0.030 0 -0.030 0 -0.030 4 5 5 VA 2H9 2H9 3H9 UB 4.5 6 6 UA M3 x 0.5 M3 x 0.5 M4 x 0.7

7

suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5

NCQ8

Q J E D-rod Dia.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Electric Grippers

6 !8 !0 i !5 Step Motor (Servo/24 VDC) y !1 !2 !4 q u w e r t !7 Component Parts No.

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

•

G ZPR4DD 40 43 29 425 17 53.3 [71.1 1 6 8 Applicable tube (mm) 25 1 0 ZPR250 28 20 45.8 636 5 35 6 8 Applicable tutle 0 .0 .t P Q R "5 .6 6 24.3 16.8 12.8 " 8 8 26.2 18.7 ' 15.2 APpllC<>Qle tube 0 .0 .p Q R , .4 4 23.3 15.8 10.4 Applicable tube (mm) .5 6 ' 6 24.3 16.8 12.8 ,8 8 26.2 18.7 1 5.2 21 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Bellows --Vacuum Entry

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Fieldbus System

(No.4-40 UNC) 5 Joint bracket Links Units to one another. 6 Connector for Unit (Plug) Transmits signals to the neighboring Unit and supplies power. y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Pin Clamp Cylinders

of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0 080 11.5 15.5 8 6 20 12 8.5 20 16 11.5 25 3.5 3.5 5 5 10.9 6 6.5 14.3 8.5 085 8.6 086 8.7 087 8.8 088 8.9 089 9.0 090 12.5 17.5 125 12.6 126 12.7 127 12.8 128

One-touch Fittings

23.6 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

6 No.

Mechanically Jointed Rodless Cylinder Series MY1

-X D 11.4 11.4 13.4 d 6 6 8 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 WX 38 48 54 Bore size (mm) 25 32 40 Individual -X Technical data 1073 Series MY1W Dimensions: 50, 63 MM M (LL) L B ! " C LD # $ % " J K PA YW QW LW PB Q& ' ( PG ) ! *+*%*"% , . . /*#! ( * * % # 0 W CH LH RR SS NE RR SS H HH NH PP QQ NC . 0 ! !% GA TT UU UU TT . GC . /*#! ( * * % # . /*#!