Basic type / Direct mount type Series CY3B/CY3R

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

New

2 3 VXFA2 A<1 2 3 t r r w w e e q q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

15

M4 x 12 2.7 9 8 NW M4 x 12 2.7 9 12 NV M4 x 0.7 6 63 40 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 9 8 NU M4 x 12 2.7 11 12 NT M3 x 12 1.5 12 18 63 Component Parts Size: 40 Size: 63 Quantity Motor type NY NX 1 Motor plate 1 Quantity Motor type NY NX NW NV NU NT 1 Motor plate 1 1 1 No.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

Modular F.R.L. Units

1 q r e w t i u y o !0 !

New

1 56 56 70.5 70.5 52 60 68 73 75 75 92 92 30 34.5 39 41 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31 35 43 45 13.5 Electrical entry Conduit terminal Conduit Faston Port size P Model Q R Q R Q R S T 71 71 73.5 73.5 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 50 50 52.5 52.5 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) 25.5 25.5 28 28 63.5 (70) 68.5 (74.5) 76.5 (82.5) 79.5 (85) 100 (106.5

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

NCQ8

4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1

VFS

-1 VVF2000-26-6 AXT625-6 q w e r t y u Steel plate NBR NBR NBR NBR NBR Resin Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations AXT333-12 Rubber plug NBR !

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Air Fittings & Tubing

KQ2U23 to KQU12 KQ2U16 SKQ19, #1 to #6 SKQ21, #16 Different diameter union Y: KQ2U Effective area (mm2) Tube O.D. (mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

1 !3 q u !0 !2 r y e !5 o !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.

Air Cylinder

Construction (Not able to disassemble) Single acting, Spring return r q e i o u w !4 !2 !3 !1 !0 t y !5 Rod section With auto switch Single acting, Spring extend r q i o u e w !4 !6 !0 !1 !2 !3 t y !5 Rod section With auto switch Component Parts No. Description Material Note 1 Rod cover Aluminum alloy No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Cable color Signal Nil 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Electric Grippers

6 !8 !0 i !5 Step Motor (Servo/24 VDC) y !1 !2 !4 q u w e r t !7 Component Parts No.

•

G ZPR4DD 40 43 29 425 17 53.3 [71.1 1 6 8 Applicable tube (mm) 25 1 0 ZPR250 28 20 45.8 636 5 35 6 8 Applicable tutle 0 .0 .t P Q R "5 .6 6 24.3 16.8 12.8 " 8 8 26.2 18.7 ' 15.2 APpllC<>Qle tube 0 .0 .p Q R , .4 4 23.3 15.8 10.4 Applicable tube (mm) .5 6 ' 6 24.3 16.8 12.8 ,8 8 26.2 18.7 1 5.2 21 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Bellows --Vacuum Entry