CY1

9 @0 q !6 !5 u i !0 y !7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

CXWM/CXWL

2 !3 !4 !5 !6 !7 !8 !

Slide Unit Series CX2/CXWM/CXWL

6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

Slide Unit Series CX2/CXWM/CXWL

6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Vacuum Pad: Ball Joint Type

13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon

Modular Type Air Filter Series AF

Float type auto drain (N.O.) 2 Metal bowl Optional specifications 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard J Drain guide 1/4 R Flow direction: Right to left W Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) Z Standard specifications Model AFM20 AFM30 AFM40 AFM40-06 1/4 3/8 1/2 1/8 1/4 1/4 3/8 Port sizes

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

rep-filter-e

Fig. 4 470 Series FGA Replacement Procedure of Element 4 6. Mounting of the Cover 6-1. After confirmation that there is no damage in the gasket, set it at specified position and set the bolts of q w and e, washer, nut and tighten it uniformly diagonally. When the gasket is damaged, exchange it for new one. 6-2.

Industrial Filters Replacement Procedure

Fig. 4 470 Series FGA Replacement Procedure of Element 4 6. Mounting of the Cover 6-1. After confirmation that there is no damage in the gasket, set it at specified position and set the bolts of q w and e, washer, nut and tighten it uniformly diagonally. When the gasket is damaged, exchange it for new one. 6-2.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Prevents Micro-Bubbles

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

MGP

6 XAH7 depth 6 GA PB Q 2-P (plug) PA + Stroke GB J K S FB FA C + Stroke B + Stroke E A + Stroke G Note 1) Refer to "Manufacture of Intermediate Strokes" on page 19 for intermediate strokes.

CA2

Data 6-8-43 44 Series CBA2 Construction Head side end lock @1 @2 !6 !7!8 !9 @9 #0 #1 #2 #3 #4 #5 #6 !3 e r t y u q !4 !5 w !2 @0 @8 o !0 !

LEC-OM071xx

3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

MQQ

6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !