DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 8.13505 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.62970 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.05650 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 9.83261 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.19670 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 6.17294 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 12.05194 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, 25MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 9.83261 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

4 Port Solenoid Valve Series VQD1000

When ordering a valve with a lead wire of 600 mm or longer, be sure to indicate the model number of the valve without connector and connector assembly. Proper tightening torque (Nm) 0.18 to 0.25 1559 Series VQD1000 Specific Product Precautions 2 Be sure to read before handling.

7.5

connector Ambient and fluid temperature (C) Maximum operating frequency (Hz) 10 3 Non-locking push type Push-turn locking slotted type Main and pilot valve common exhaust Pilot valve individual exhaust Not required Unrestricted 150/30 Dustproof Manual override (Manual operation) Internal pilot External pilot Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2

energy saving effect

] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v HRW Standard item dV dt HECR = Voltage increase ratio Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v dV HEC Time HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2

53

3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH090-ll-40 3-phase 380 to 415 VAC (50/60 Hz) 20 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

5 Port Solenoid Valve

VQC5000 Bore size MB, CA1 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm CS1 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Average speed [mm/s] 50 63 80 100 125 140 160 180 200 250 1100 Vertically upward Horizontal 1000 900 800 700 600 500 400 300 200 100 0 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open

ZSP1

S1 S2 PS P1 Indicator light Vacuum source Pressure sensor Z I SE1 2 Adjustment needle S3 S4 P2 ZSP Adsorption (0.3 to 1.2) ISA2 Internal Circuit and Wiring Example IS Lead wire colors inside ( ) are those prior to conformity to IEC standards.

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment generated by the load equivalent to impact at the stroke end We: Load equivalent to impact [N] m : Load mass [kg] U: Max. speed [mm/s] g: Gravitational acceleration [9.8 m/s2] We = 5 x 103 x m x g x U Pich moment Me1 = 1/3 We (L + B) 103 Yaw moment Me3 = 1/3 We (L

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

the workpiece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.