FGG-E

Port size : Rp1/4 Port size : R3/4 OUTLET Outlet of filtered fluid Port size:R2 Fig. 1 Description of parts and functions Table 1. Description and function of parts No Description Part number Material Function Hex.

VBA-OM-P019

2 VBA-OM-P019-A VBAT20A1-T-X104VBAT38A1-T-X104 VBAT-M36C / VBA2 4 VBA4 4 /VBAT20A-Y-3 VBA2 4 VBAT20A1-T-X104 VBAT38A1-T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/

VBA-OM-S007

VBA-OM-S007 4 13 ()() OUT () 30 1 1 VBA2 4 VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XL VALVE, R3 MAT'L, HIGH VACUUM VALVE, L45, 0.68 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA, EXTERNAL SEAL, R3 MAT'L, HIGH VACUUM VALVE, L45, 0.265 lb

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

K35-OMX0069

Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

pc. 1 pc.

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: B (PNP, 2 Outputs), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

KQ2-G

/8, Rc3/8 04 R1/2, Rc1/2 Thread connection 1: Only for Bulkhead union and Bulkhead male elbow Spare Parts Applicable tubing O.D.

Fitting Type: T (Union Tee), Size Combination: 6A-R3 (A: 1" x 7/8", B: 3/8" x 1/4", C: 1" x 7/8")

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: S (Centralized Lead Wire, Lead Wire Only), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge;

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

Positioning Method: 1 (Ball Coupling), Operation: 1 (Double Acting), Electrical Entry: C (3m Cable), Robot Adapter: R3 (Applicable Shaft Diameter Ø14)

Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)

Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 2000mm, Motor Option: w/o Option, Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller: C51 [Parallel Input (NPN)], Mounting: 7 (Screw Mounting), I/O Cable: 1 (I/O

/O Cable: 1 (I/O Cable, 1.5m)