IDX-OM-V024 . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION
. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION
DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS
(p)3R2R5R1 3(R2 3(R2 3(R2 3(R2 R) R) R) R) 5(R1) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.
IDFC80-23 IDFC90-23 2080 0.151.0MPa (7) (1) () 2045 oC85% (2) 20 oC 4.7m 3/min 7.8m 3/min 10.9m 3/min 15.4m 3/min 10 oC 2.8m 3/min 4.7m 3/min 6.5m 3/min 9.2m 3/min 3 oC 0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g
button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.
D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5
. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5
. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6
130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal Series XMC, XYC How to Order XMC XYC M9N A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.
-) 12 V 300 24 V 600 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -21No.PS-OMU0002CN-D [] 3 0.2 [] / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (61 ) 3 () () (24 ) (26 ) (28 ) 3 () 3 -22No.PS-OMU0002CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20A [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [H_1] OUT1 0.050
3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-8
single: VZA4141-01 02 Pilot port (A side) M5 x 0.8 body side 2 x 4.5 Mounting hole Pilot port (A side) (R1, R2 port) (P , A, B port) 2 x Rc 18 3 x Rc , 18 14 2 x M5 x 0.8 sub-plate side 2 position double: VZA4241-01 02 Pilot port (B side) Body side Pilot port (A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 2 x Rc 18 18 14 3 x Rc , 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1
OUT1 -50.5 kPa [H_1] OUT1 5.1 kPa ZSE20F [P_1] OUT1 50.0 kPa [H_1] OUT1 5.0 kPa 1 -21No.PS-OMS0006CN-G 3 3 3 () <> 3() 3(P_1n_1)(H_1) () () 1 1 1[-]( (50)) -22No.PS-OMS0006CN-G (P1LP1H) 22P1L()P1H()WH1() (n1Ln1H) 31 [F 1]OUT1// -23No.PS-OMS0006CN-G <> () ,() 13[SEt] [SEt] ()[P_1][n_1] ()( ) ()( 50) ( )(50 ) 2OUT1 (2P_1) 1 2 2 3(29)OFF ([SEt]) -24No.PS-OMS0006CN-G 24 P1L()
OUT2 5.0 kPa 1 -24No.PS-OMU0005CN-C 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () () 1 1 1[-](( 62)) -25No.PS-OMU0005CN-C (P1LP1H) 25P1L()P1H()WH1() (n1Ln1H) 34 OUT2 [F 1]OUT1[F 2]OUT2// -26No.PS-OMU0005CN-C <> () ,() 13[SEt] [SEt]()[P_1][n_1]() () ()( 62) ( )(62 ) 2 (2OUT2) 1 2 2 3(32)OFF ([SEt]) 4OUT2OUT2[P_2][n_2] -27No.PS-OMU0005CN-C 27 P1L()P1H()WH1() dt1() (n1L n1H) 34 OUT2
[February 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2022 SMC Corporation All Rights Reserved No.PS-OMM0005-J
Pin description 1 2 3 4 1 2 DC (+) OUT (2) DC () OUT (1) 3 4 3 Blue 4 Black 12 Series ZSE30A(F)/ISE30A Specific Product Precautions 1 Be sure to read this before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Pressure Switches Precautions. Handling Mounting Warning Caution 1.