SMC Corporation of America
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connector Ambient and fluid temperature (C) Maximum operating frequency (Hz) 10 3 Non-locking push type Push-turn locking slotted type Main and pilot valve common exhaust Pilot valve individual exhaust Not required Unrestricted 150/30 Dustproof Manual override (Manual operation) Internal pilot External pilot Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2

] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v HRW Standard item dV dt HECR = Voltage increase ratio Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v dV HEC Time HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2

3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH090-ll-40 3-phase 380 to 415 VAC (50/60 Hz) 20 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

VQC5000 Bore size MB, CA1 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm CS1 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Average speed [mm/s] 50 63 80 100 125 140 160 180 200 250 1100 Vertically upward Horizontal 1000 900 800 700 600 500 400 300 200 100 0 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open

S1 S2 PS P1 Indicator light Vacuum source Pressure sensor Z I SE1 2 Adjustment needle S3 S4 P2 ZSP Adsorption (0.3 to 1.2) ISA2 Internal Circuit and Wiring Example IS Lead wire colors inside ( ) are those prior to conformity to IEC standards.

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment generated by the load equivalent to impact at the stroke end We: Load equivalent to impact [N] m : Load mass [kg] U: Max. speed [mm/s] g: Gravitational acceleration [9.8 m/s2] We = 5 x 103 x m x g x U Pich moment Me1 = 1/3 We (L + B) 103 Yaw moment Me3 = 1/3 We (L

the workpiece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 range 400 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specification Max acceleration /deceleration [mm/s2] Horizontal 10 Vertical 5000 Pushing speed [mm/s2] Note5) 35 30 Positioning repeatability [mm] 0.05 Lost motion [mm] Note6) 0.1 or less Lead [mm] 20 12 6 3 24 16 8 4 Impact/Vibration resistance [m/s2] Note7) 50/20 Actuation

Mount switches in locations where there is no vibration greater than 98 m/s2, or no impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Wall *1 For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.