Table of Contents

184 234 I 14 17 L +0.036 0 +0.036 0 SB 14 17.5 SA 9 11 NB SC 31 32 R 118 148 O 7.5 10.5 Q 23 31 UA M8 x 1.25 M10 x 1.5 NA 37 43 NC 21 25 TA M8 x 1.25 M10 x 1.5 M 4 6 P Rc 1/4 Rc 3/8 TB 16 20 UB 16 20 VA Model MHSL3-100D MHSL3-125D 0 0.043 0 0.052 +0.036 0 +0.036 0 18h9 22h9 8H9 10H9 8H9 10H9 XA +0.036 0 +0.036 0 XB 6 8 VB 6 8 WA WB 4 6 Model MHSL3-100D MHSL3-125D +0.087 0 +0.100 0 102H9

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

CM2

13 8 17.5 25 25 24.5 10.5 6 13 8 17.5 32 32 27 11.5 6 13 8 17.5 40 40 32.5 15 8 16 11 21.5 6-4-19 20 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S + Stroke Z + Stroke ZZ + Stroke LZ + Stroke 2-Rc P Width across flats B1 Refer to p. 6-4-22 for details of clevis pivot bracket.

ITV

RS-232C communication Rc NPT NPTF G Nil N T F Bracket is included.

Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

ZP

M3 x 0.5 M5 x 0.8 Vacuum entry 6 Nylon tube 6 Urethane tube 4 tube 6 tube 10 to 32 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 Nylon tube 6 Urethane tube 6 tube 8 tube M5 x 0.8 Rc 40, 50 1 8 2 to 8 10 to 32 40, 50 M8 x 1 Male thread M10 x 1 Male thread

VQC

(Terminal Block Box Kit) Conforms to IP67 VV5QC41 L2 6.5 79.5 L1 65.5 P = 25 Indicator light 7 Manual override 163 9 9 A B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 VDC 6 One-touch fitting C6 2 4 One-touch fitting C4 (EA)5 1 (P) 3(EB) V 6 VDC 6 One-touch fitting C6 10-SY5000 S 5 VDC 8 One-touch fitting C8 3 position closed center 10-SY9000 has no bracket.

5-Port Solenoid Valve

One-touch fitting (Metric) Symbol A, B port SY3000 SY5000 SY7000 C2 2 V C3 3.2 V C4 4 V V C6 6 V V C8 8 V V C10 10 V o Thread type Nil Rc F G N NPT T NPTF Fixed Metal Base Made to Order !

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

5

4 6 6 4 8 6 4 21.5 2 0 2 [4.5] 2 0 19 20 10 7.5 2.5 10 7.5 4.5 10 7.5 25 6 3.5 1.5 [1] 6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

16 19.4 WB 32 38.5 49 X 5 5 6 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 W 72 87.5 109 Stroke 30 30 40 Bore size (mm) 50 63 80 Model Nil Rc 1/8 Rc 1/4 Rc 1/4 TF G 1/8 G 1/4 G 1/4 24 24 23 RS1H50 RS1H63 RS1H80 Note 1) The figure shows dimensions at the maximum energy absorption capacity.

Cylinder with Lock

y @8 #6 e t u i !

5 Port Solenoid Valve

, NPT, NPTF, G) 1/4 3/8 (Rc, NPT, NPTF, G) VFR VQ7 1/2 (Rc, NPT, NPTF, G) 1/2 (Rc, NPT, NPTF, G) C6 (for 6) C8 (for 8) C10 (for 10) C12 (for 12) N7 (1/4") N9 (5/16") N11 (3/8") 1/4 3/8 1/4 (Bottom ported) ^{1/2 (Rc, NPT, NPTF, G) V V V V V Page 626 Page 628 Page 630 Page 632 Page 634 3/4 (Rc, NPT, NPTF, G) (Rc, NPT, NPTF, G) D side 1/2 (Rc, NPT, NPTF, G) U side}

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

High Purity Fluoropolymer

L1 L2 H G F M N E B Y (E) F 2-B 4 6 4 6 LQ2R22-F LQ2R21-F 18.5 (L1) 18.7 1/8" 4 19 6 19.9 12 18 14 LQ2R51-F LQ2R44-F LQ2R43-F LQ2R42-F LQ2R41-F LQ2R36-F LQ2R35-F LQ2R34-F LQ2R33-F LQ2R32-F LQ2R31-F LQ2R24-F LQ2R23-F N Y (M) 21.5 22.5 1/4" SMC G (E) 10 H 21.5 6 8 23.5 (L2) (L1) 1/4" Class 2, 3 5 22 9 26.2 18 24 19 Rc (NPT) Port size 10 25 6 8 26 3/8" 12 10 12 25 27 3/8" 6 28 11 33.1 21 22

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Plug-in Unit

Side C12 (For 12) P: Rc 1/2 VQC400-5 S kit 1 to 12 stations: EX240, EX250 1 to 8 stations: EX500 1 to 8 stations: EX126 Rc 1/4 VQC4000 VV5QC41R: Rc 3/4 VQC401-5 Rc 3/8 Bottom Rc 1/4 Note 1) One-touch fittings in inch sizes are also available.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.