17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

AC Servo Motor Driver

For the specification of power supply, refer to section 1.3. 3 64 4. STARTUP 4.

EX510-GDN1.eng

OFF 64 16 16 16 16 OFF OFF OFF OFF OFF OFF ON 0 3 OFF 16 8 8 ON ON ON 16 16 OFF 32 8 8 8 8 OFF OFF ON ON ON ON Check the connection of UNLIT COM port branch to input unit. 4 COM A-D is not LIT ON 32 16 16 ON ON OFF ON Reserve No.5 No.6 No.4 Output point COM A COM B COM C COM D OFF 64 16 16 16 16 OFF OFF OFF OFF OFF OFF ON 0 OFF 16 8 8 ON ON ON 16 16 OFF 32 8 8 8 8 ON ON ON ON OFF OFF ON 32

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

16 bit 64 word 64 word 3 EX600-DYPB Digital outputs (8 outputs) 16 bit 16 bit 4 EX600-DXPD Digital inputs (16 inputs) 16 bit 16 bit Total 96 bit 96 bit 160 word 160 word -40No.EX-OMW1003-A I/O map The following is an input/output map for the bit and word areas.

Air Cylinder CP Series Cylinder Positioner Assembly

18.0 l3i ) (37) z.2a (58) 7.20 (143) 7 6 8 o95) 2.05 (52) 11.2) 2 6 0 (66) S T o e 7.52 1 9 1 ) 799 1203t L3a 135) l85l 2.52 (64) 0.79 (20) 1.57 140) 0.39 00) 0.67 (171 M8x1.25 0.28 t7) 1 5 7 M 1 8 x 1 . 5 '|.22 (31) 0.63 (16) 3.65 {98) 1.91 (23) 25.0 l3i ) 1.89 ga) 2.24 (58) T.-t2 (r96j 8.35 (212) 2.O5 (vJ 1 1 2 ) ?.

Large Bore Compact Cylinder Series CQ2

flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

Shock Absorbers and Rate Controls

r3.045 {Mrl M45 x r.5 12.7 38.0 44.5 8.0 ||/A 35.0 60 ||/A l|/A Pt|t575 t -1, -2, -3 246.0 264.0 45 {Mt} ll45 x 1.5 12.7 38.0 44.5 143.0N/A 35.0 t3 N/A illA Pttt2050tit -1, -2, -3 226.0 32S^0 243.0 64 {Mt) M64 " 2.0 19.0 50.0 57.0 140.0N/A 38.0 t0 N/A N/A Pfzt00fiI t, -2, -3 345.0 64 lMFlMt4 " 2.0 It0 50.0 57.0 191.0N/A 380 95 N/A N/A Ptil2t50illt t, -2, -3 456.0 473.0 64 {Mr) M64 , 2.0 r9.0

Compact Cylinder with Air Cushion Series RQ

Rod end nut L1 Front flange type Front flange type/RQF, RDQF mm Bore size (mm) Stroke range (mm) A L L1 15 to 50 20 46.5 14.5 28.5 15 to 50 25 51.5 15 32.5 FV mm FX 8 Bore size (mm) B FV FW FX FZ B + Stroke L FZ A + Stroke 2-6.6 20 39 48 32 40.5 60 25 42 52 36.5 44.5 64 Rod end male threads (Only dimensions A, L, and L1 are different and other dimensions are identical.)

Sine Rodless Cylinder Series REBR Direct Mount Type

56 50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28 56 64 28 26 20 20 16 REBH15 REBH15 13 Moment (Nm) Moment (Nm) 10 10 2 2.5 3 4 5 3 4 5 M3 2 1.5 1 1 0.5 0.5 M1 M2 70 100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Hydraulic Filters

pressure indicator Differential pressure indication switch Air breezer Cap 10 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 Suction Guard FHG series Micromesh 74, 105, 149 Negative pressure Max. 3.5, 7, 14, 21 MPa Paper 5, 10, 20 (Micromesh) Differential pressure indicator Differential pressure indication switch Blanking cap 14 3/8, 1/2, 3/4, 1, 1 1/4 1 1/2, 2, 2 1/2, 3 Line Filter FH34/44/54/64

Title not found

Note 3) Not compatible with 64-bit Windows XP and 64-bit Windows Vista. For MR Configurator (setup software English version), contact your nearest sales branch. USB cable (3 m) for setup software LEC MR J3USB Battery LEC MR J3BAT 64 Series LECSA/LECSB Specific Product Precautions 1 Be sure to read before handling.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Actuator Controller q q w 549 Fieldbus Network CC-Link Direct Input Type Step Motor Controller LECPMJ Series Page 600 CC-Link Ver. 1.10 compliant External data import function The step data can be rewrite temporarily by feeding back external information to the PLC. 64 or more data points can be defined with the 3 types of data import modes.

Modular F.R.L. Units

When a pressure gauge is included, the display will show a range from 0 to 0.7 MPa. r Clean Series (10-) e t Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 64 A Regulator AR10-A Symbol Regulator 2 1 AR10-A Refer to page 67 for size 20 to 60. How to Order AR10 M5 A Option/Semi-standard: Select one each for a to g.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 28.8 (L4) U side D side L5 18.4 4 x 5.3 (For mounting) (5.3) (4.9) 8 B B B B B 115.5 5.5 109.4 102.9 97.5 M3 Terminal screw 35 A A A A A 13 64

Slider Type Ball Screw Drive/11-LEFS Series

350l 547 589 356 430 8 3 300 11-LEFS16l-400l 597 639 406 480 10 4 400 11-LEFS16l-450l 647 689 456 530 10 4 400 11-LEFS16l-500l 697 739 506 580 12 5 500 40 518 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS25 (102) ( ) +0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 64

CE

60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

Stroke Reading Cylinder and Counter

Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60 9 M10 x 1.5 64 35 19 89.5 For rod end nut accessory bracket, refer to page 658.

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

CP95

ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory C, D, E and CR [First angle projection] Mounting style (C) Mounting style (D) CJ1 CJP CJ2 CM2 CG1 Bore size (mm) E1 EW TG1 FL l1 L I2 d1 CD MR d2 R1 E2 UB CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64